Matches in SemOpenAlex for { <https://semopenalex.org/work/W3137415076> ?p ?o ?g. }
Showing items 1 to 60 of
60
with 100 items per page.
- W3137415076 created "2021-03-29" @default.
- W3137415076 creator A5011829778 @default.
- W3137415076 date "2020-08-31" @default.
- W3137415076 modified "2023-09-22" @default.
- W3137415076 title "Ar/N 2 gas flow ratio dependence on the high-k LaB x N y thin film characteristics formed by RF sputtering" @default.
- W3137415076 hasPublicationYear "2020" @default.
- W3137415076 type Work @default.
- W3137415076 sameAs 3137415076 @default.
- W3137415076 citedByCount "0" @default.
- W3137415076 crossrefType "journal-article" @default.
- W3137415076 hasAuthorship W3137415076A5011829778 @default.
- W3137415076 hasConcept C113196181 @default.
- W3137415076 hasConcept C121332964 @default.
- W3137415076 hasConcept C171250308 @default.
- W3137415076 hasConcept C185592680 @default.
- W3137415076 hasConcept C19067145 @default.
- W3137415076 hasConcept C192562407 @default.
- W3137415076 hasConcept C22423302 @default.
- W3137415076 hasConcept C38349280 @default.
- W3137415076 hasConcept C43617362 @default.
- W3137415076 hasConcept C49040817 @default.
- W3137415076 hasConcept C57879066 @default.
- W3137415076 hasConceptScore W3137415076C113196181 @default.
- W3137415076 hasConceptScore W3137415076C121332964 @default.
- W3137415076 hasConceptScore W3137415076C171250308 @default.
- W3137415076 hasConceptScore W3137415076C185592680 @default.
- W3137415076 hasConceptScore W3137415076C19067145 @default.
- W3137415076 hasConceptScore W3137415076C192562407 @default.
- W3137415076 hasConceptScore W3137415076C22423302 @default.
- W3137415076 hasConceptScore W3137415076C38349280 @default.
- W3137415076 hasConceptScore W3137415076C43617362 @default.
- W3137415076 hasConceptScore W3137415076C49040817 @default.
- W3137415076 hasConceptScore W3137415076C57879066 @default.
- W3137415076 hasLocation W31374150761 @default.
- W3137415076 hasOpenAccess W3137415076 @default.
- W3137415076 hasPrimaryLocation W31374150761 @default.
- W3137415076 hasRelatedWork W1975096616 @default.
- W3137415076 hasRelatedWork W1986640181 @default.
- W3137415076 hasRelatedWork W1993416847 @default.
- W3137415076 hasRelatedWork W2001415651 @default.
- W3137415076 hasRelatedWork W2001877924 @default.
- W3137415076 hasRelatedWork W2012401096 @default.
- W3137415076 hasRelatedWork W2049362858 @default.
- W3137415076 hasRelatedWork W2075094506 @default.
- W3137415076 hasRelatedWork W2092204195 @default.
- W3137415076 hasRelatedWork W2244899777 @default.
- W3137415076 hasRelatedWork W2246418184 @default.
- W3137415076 hasRelatedWork W2326719433 @default.
- W3137415076 hasRelatedWork W2333271161 @default.
- W3137415076 hasRelatedWork W2355176946 @default.
- W3137415076 hasRelatedWork W2386321714 @default.
- W3137415076 hasRelatedWork W2388276715 @default.
- W3137415076 hasRelatedWork W2588462878 @default.
- W3137415076 hasRelatedWork W2998416066 @default.
- W3137415076 hasRelatedWork W3027194656 @default.
- W3137415076 hasRelatedWork W2976713761 @default.
- W3137415076 isParatext "false" @default.
- W3137415076 isRetracted "false" @default.
- W3137415076 magId "3137415076" @default.
- W3137415076 workType "article" @default.