Matches in SemOpenAlex for { <https://semopenalex.org/work/W3141529507> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W3141529507 endingPage "4" @default.
- W3141529507 startingPage "1" @default.
- W3141529507 created "2021-04-13" @default.
- W3141529507 creator A5005758715 @default.
- W3141529507 creator A5009696660 @default.
- W3141529507 creator A5036918622 @default.
- W3141529507 date "2010-01-01" @default.
- W3141529507 modified "2023-09-24" @default.
- W3141529507 title "Hydrogen concentration effect during RIE process for piezo resistor of MEMS pressure sensor" @default.
- W3141529507 hasPublicationYear "2010" @default.
- W3141529507 type Work @default.
- W3141529507 sameAs 3141529507 @default.
- W3141529507 citedByCount "0" @default.
- W3141529507 crossrefType "proceedings-article" @default.
- W3141529507 hasAuthorship W3141529507A5005758715 @default.
- W3141529507 hasAuthorship W3141529507A5009696660 @default.
- W3141529507 hasAuthorship W3141529507A5036918622 @default.
- W3141529507 hasConcept C111919701 @default.
- W3141529507 hasConcept C119599485 @default.
- W3141529507 hasConcept C127413603 @default.
- W3141529507 hasConcept C137488568 @default.
- W3141529507 hasConcept C165801399 @default.
- W3141529507 hasConcept C178790620 @default.
- W3141529507 hasConcept C185592680 @default.
- W3141529507 hasConcept C192562407 @default.
- W3141529507 hasConcept C24326235 @default.
- W3141529507 hasConcept C37977207 @default.
- W3141529507 hasConcept C41008148 @default.
- W3141529507 hasConcept C41325743 @default.
- W3141529507 hasConcept C49040817 @default.
- W3141529507 hasConcept C512968161 @default.
- W3141529507 hasConcept C78519656 @default.
- W3141529507 hasConcept C98045186 @default.
- W3141529507 hasConceptScore W3141529507C111919701 @default.
- W3141529507 hasConceptScore W3141529507C119599485 @default.
- W3141529507 hasConceptScore W3141529507C127413603 @default.
- W3141529507 hasConceptScore W3141529507C137488568 @default.
- W3141529507 hasConceptScore W3141529507C165801399 @default.
- W3141529507 hasConceptScore W3141529507C178790620 @default.
- W3141529507 hasConceptScore W3141529507C185592680 @default.
- W3141529507 hasConceptScore W3141529507C192562407 @default.
- W3141529507 hasConceptScore W3141529507C24326235 @default.
- W3141529507 hasConceptScore W3141529507C37977207 @default.
- W3141529507 hasConceptScore W3141529507C41008148 @default.
- W3141529507 hasConceptScore W3141529507C41325743 @default.
- W3141529507 hasConceptScore W3141529507C49040817 @default.
- W3141529507 hasConceptScore W3141529507C512968161 @default.
- W3141529507 hasConceptScore W3141529507C78519656 @default.
- W3141529507 hasConceptScore W3141529507C98045186 @default.
- W3141529507 hasLocation W31415295071 @default.
- W3141529507 hasOpenAccess W3141529507 @default.
- W3141529507 hasPrimaryLocation W31415295071 @default.
- W3141529507 hasRelatedWork W1593283795 @default.
- W3141529507 hasRelatedWork W2002048780 @default.
- W3141529507 hasRelatedWork W2067632191 @default.
- W3141529507 hasRelatedWork W2099093561 @default.
- W3141529507 hasRelatedWork W2099368553 @default.
- W3141529507 hasRelatedWork W2110744983 @default.
- W3141529507 hasRelatedWork W2114848912 @default.
- W3141529507 hasRelatedWork W2141624791 @default.
- W3141529507 hasRelatedWork W2164861392 @default.
- W3141529507 hasRelatedWork W2250075826 @default.
- W3141529507 hasRelatedWork W2294602263 @default.
- W3141529507 hasRelatedWork W2325802297 @default.
- W3141529507 hasRelatedWork W2372394413 @default.
- W3141529507 hasRelatedWork W2588944211 @default.
- W3141529507 hasRelatedWork W2600367560 @default.
- W3141529507 hasRelatedWork W2744972070 @default.
- W3141529507 hasRelatedWork W3035424889 @default.
- W3141529507 hasRelatedWork W2141304022 @default.
- W3141529507 hasRelatedWork W2141630209 @default.
- W3141529507 hasRelatedWork W2830157357 @default.
- W3141529507 isParatext "false" @default.
- W3141529507 isRetracted "false" @default.
- W3141529507 magId "3141529507" @default.
- W3141529507 workType "article" @default.