Matches in SemOpenAlex for { <https://semopenalex.org/work/W3147015886> ?p ?o ?g. }
Showing items 1 to 60 of
60
with 100 items per page.
- W3147015886 endingPage "95" @default.
- W3147015886 startingPage "90" @default.
- W3147015886 created "2021-04-13" @default.
- W3147015886 creator A5002057327 @default.
- W3147015886 creator A5016928371 @default.
- W3147015886 creator A5088044548 @default.
- W3147015886 date "1990-01-01" @default.
- W3147015886 modified "2023-09-24" @default.
- W3147015886 title "Supervisory Control for Semiconductor Processing" @default.
- W3147015886 doi "https://doi.org/10.1109/acc.1990.4173716" @default.
- W3147015886 hasPublicationYear "1990" @default.
- W3147015886 type Work @default.
- W3147015886 sameAs 3147015886 @default.
- W3147015886 citedByCount "0" @default.
- W3147015886 crossrefType "proceedings-article" @default.
- W3147015886 hasAuthorship W3147015886A5002057327 @default.
- W3147015886 hasAuthorship W3147015886A5016928371 @default.
- W3147015886 hasAuthorship W3147015886A5088044548 @default.
- W3147015886 hasConcept C108225325 @default.
- W3147015886 hasConcept C154945302 @default.
- W3147015886 hasConcept C192562407 @default.
- W3147015886 hasConcept C2775924081 @default.
- W3147015886 hasConcept C41008148 @default.
- W3147015886 hasConcept C49040817 @default.
- W3147015886 hasConcept C92991967 @default.
- W3147015886 hasConceptScore W3147015886C108225325 @default.
- W3147015886 hasConceptScore W3147015886C154945302 @default.
- W3147015886 hasConceptScore W3147015886C192562407 @default.
- W3147015886 hasConceptScore W3147015886C2775924081 @default.
- W3147015886 hasConceptScore W3147015886C41008148 @default.
- W3147015886 hasConceptScore W3147015886C49040817 @default.
- W3147015886 hasConceptScore W3147015886C92991967 @default.
- W3147015886 hasLocation W31470158861 @default.
- W3147015886 hasOpenAccess W3147015886 @default.
- W3147015886 hasPrimaryLocation W31470158861 @default.
- W3147015886 hasRelatedWork W1768774555 @default.
- W3147015886 hasRelatedWork W1886498162 @default.
- W3147015886 hasRelatedWork W1933306266 @default.
- W3147015886 hasRelatedWork W1949617397 @default.
- W3147015886 hasRelatedWork W1982162502 @default.
- W3147015886 hasRelatedWork W2014055117 @default.
- W3147015886 hasRelatedWork W2066567429 @default.
- W3147015886 hasRelatedWork W2100183064 @default.
- W3147015886 hasRelatedWork W2107550485 @default.
- W3147015886 hasRelatedWork W2120799761 @default.
- W3147015886 hasRelatedWork W2120951552 @default.
- W3147015886 hasRelatedWork W2140186278 @default.
- W3147015886 hasRelatedWork W2163579143 @default.
- W3147015886 hasRelatedWork W2169818328 @default.
- W3147015886 hasRelatedWork W2172117203 @default.
- W3147015886 hasRelatedWork W2189057965 @default.
- W3147015886 hasRelatedWork W2534331327 @default.
- W3147015886 hasRelatedWork W2724972828 @default.
- W3147015886 hasRelatedWork W3142338023 @default.
- W3147015886 hasRelatedWork W2775226131 @default.
- W3147015886 hasVolume "27" @default.
- W3147015886 isParatext "false" @default.
- W3147015886 isRetracted "false" @default.
- W3147015886 magId "3147015886" @default.
- W3147015886 workType "article" @default.