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- W3148442868 created "2021-04-13" @default.
- W3148442868 creator A5014325125 @default.
- W3148442868 creator A5028351719 @default.
- W3148442868 creator A5029551963 @default.
- W3148442868 creator A5032300992 @default.
- W3148442868 creator A5055518962 @default.
- W3148442868 creator A5064243796 @default.
- W3148442868 date "2006-04-28" @default.
- W3148442868 modified "2023-09-27" @default.
- W3148442868 title "Wafer Level Thin Film Encapsulation for MEMS" @default.
- W3148442868 cites W2072613669 @default.
- W3148442868 cites W2138732041 @default.
- W3148442868 doi "https://doi.org/10.1109/eptc.2005.1614401" @default.
- W3148442868 hasPublicationYear "2006" @default.
- W3148442868 type Work @default.
- W3148442868 sameAs 3148442868 @default.
- W3148442868 citedByCount "3" @default.
- W3148442868 countsByYear W31484428682013 @default.
- W3148442868 crossrefType "proceedings-article" @default.
- W3148442868 hasAuthorship W3148442868A5014325125 @default.
- W3148442868 hasAuthorship W3148442868A5028351719 @default.
- W3148442868 hasAuthorship W3148442868A5029551963 @default.
- W3148442868 hasAuthorship W3148442868A5032300992 @default.
- W3148442868 hasAuthorship W3148442868A5055518962 @default.
- W3148442868 hasAuthorship W3148442868A5064243796 @default.
- W3148442868 hasConcept C160671074 @default.
- W3148442868 hasConcept C171250308 @default.
- W3148442868 hasConcept C19067145 @default.
- W3148442868 hasConcept C192562407 @default.
- W3148442868 hasConcept C31258907 @default.
- W3148442868 hasConcept C37977207 @default.
- W3148442868 hasConcept C41008148 @default.
- W3148442868 hasConcept C49040817 @default.
- W3148442868 hasConcept C81147070 @default.
- W3148442868 hasConceptScore W3148442868C160671074 @default.
- W3148442868 hasConceptScore W3148442868C171250308 @default.
- W3148442868 hasConceptScore W3148442868C19067145 @default.
- W3148442868 hasConceptScore W3148442868C192562407 @default.
- W3148442868 hasConceptScore W3148442868C31258907 @default.
- W3148442868 hasConceptScore W3148442868C37977207 @default.
- W3148442868 hasConceptScore W3148442868C41008148 @default.
- W3148442868 hasConceptScore W3148442868C49040817 @default.
- W3148442868 hasConceptScore W3148442868C81147070 @default.
- W3148442868 hasLocation W31484428681 @default.
- W3148442868 hasOpenAccess W3148442868 @default.
- W3148442868 hasPrimaryLocation W31484428681 @default.
- W3148442868 hasRelatedWork W1511597299 @default.
- W3148442868 hasRelatedWork W1522390922 @default.
- W3148442868 hasRelatedWork W1557690381 @default.
- W3148442868 hasRelatedWork W1558259143 @default.
- W3148442868 hasRelatedWork W1897598831 @default.
- W3148442868 hasRelatedWork W1961443208 @default.
- W3148442868 hasRelatedWork W2044016404 @default.
- W3148442868 hasRelatedWork W2069753296 @default.
- W3148442868 hasRelatedWork W2072682289 @default.
- W3148442868 hasRelatedWork W2094236328 @default.
- W3148442868 hasRelatedWork W2136147599 @default.
- W3148442868 hasRelatedWork W2136732512 @default.
- W3148442868 hasRelatedWork W2149881015 @default.
- W3148442868 hasRelatedWork W2507345448 @default.
- W3148442868 hasRelatedWork W2621277722 @default.
- W3148442868 hasRelatedWork W3010878564 @default.
- W3148442868 hasRelatedWork W3026394616 @default.
- W3148442868 hasRelatedWork W3134861821 @default.
- W3148442868 hasRelatedWork W2849693506 @default.
- W3148442868 hasRelatedWork W3172697406 @default.
- W3148442868 isParatext "false" @default.
- W3148442868 isRetracted "false" @default.
- W3148442868 magId "3148442868" @default.
- W3148442868 workType "article" @default.