Matches in SemOpenAlex for { <https://semopenalex.org/work/W3148663717> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W3148663717 endingPage "73" @default.
- W3148663717 startingPage "72" @default.
- W3148663717 created "2021-04-13" @default.
- W3148663717 creator A5009917880 @default.
- W3148663717 creator A5015824388 @default.
- W3148663717 creator A5035673468 @default.
- W3148663717 creator A5043307817 @default.
- W3148663717 creator A5086638410 @default.
- W3148663717 date "1985-01-01" @default.
- W3148663717 modified "2023-09-24" @default.
- W3148663717 title "Submicron Lithography Using Focused-Ion-Beam Exposure Followed by a Dry Development" @default.
- W3148663717 hasPublicationYear "1985" @default.
- W3148663717 type Work @default.
- W3148663717 sameAs 3148663717 @default.
- W3148663717 citedByCount "0" @default.
- W3148663717 crossrefType "proceedings-article" @default.
- W3148663717 hasAuthorship W3148663717A5009917880 @default.
- W3148663717 hasAuthorship W3148663717A5015824388 @default.
- W3148663717 hasAuthorship W3148663717A5035673468 @default.
- W3148663717 hasAuthorship W3148663717A5043307817 @default.
- W3148663717 hasAuthorship W3148663717A5086638410 @default.
- W3148663717 hasConcept C121332964 @default.
- W3148663717 hasConcept C145148216 @default.
- W3148663717 hasConcept C161866238 @default.
- W3148663717 hasConcept C171250308 @default.
- W3148663717 hasConcept C192562407 @default.
- W3148663717 hasConcept C200274948 @default.
- W3148663717 hasConcept C204223013 @default.
- W3148663717 hasConcept C2779227376 @default.
- W3148663717 hasConcept C49040817 @default.
- W3148663717 hasConcept C53524968 @default.
- W3148663717 hasConcept C62520636 @default.
- W3148663717 hasConcept C70520399 @default.
- W3148663717 hasConceptScore W3148663717C121332964 @default.
- W3148663717 hasConceptScore W3148663717C145148216 @default.
- W3148663717 hasConceptScore W3148663717C161866238 @default.
- W3148663717 hasConceptScore W3148663717C171250308 @default.
- W3148663717 hasConceptScore W3148663717C192562407 @default.
- W3148663717 hasConceptScore W3148663717C200274948 @default.
- W3148663717 hasConceptScore W3148663717C204223013 @default.
- W3148663717 hasConceptScore W3148663717C2779227376 @default.
- W3148663717 hasConceptScore W3148663717C49040817 @default.
- W3148663717 hasConceptScore W3148663717C53524968 @default.
- W3148663717 hasConceptScore W3148663717C62520636 @default.
- W3148663717 hasConceptScore W3148663717C70520399 @default.
- W3148663717 hasLocation W31486637171 @default.
- W3148663717 hasOpenAccess W3148663717 @default.
- W3148663717 hasPrimaryLocation W31486637171 @default.
- W3148663717 hasRelatedWork W1487040843 @default.
- W3148663717 hasRelatedWork W1969486968 @default.
- W3148663717 hasRelatedWork W1994164260 @default.
- W3148663717 hasRelatedWork W2006677842 @default.
- W3148663717 hasRelatedWork W2013221162 @default.
- W3148663717 hasRelatedWork W2027027091 @default.
- W3148663717 hasRelatedWork W2037336969 @default.
- W3148663717 hasRelatedWork W2067794343 @default.
- W3148663717 hasRelatedWork W2137377938 @default.
- W3148663717 hasRelatedWork W2145411830 @default.
- W3148663717 hasRelatedWork W2325092007 @default.
- W3148663717 hasRelatedWork W2329293594 @default.
- W3148663717 hasRelatedWork W2466219710 @default.
- W3148663717 hasRelatedWork W2479826369 @default.
- W3148663717 hasRelatedWork W2540878389 @default.
- W3148663717 hasRelatedWork W2601366221 @default.
- W3148663717 hasRelatedWork W2625282173 @default.
- W3148663717 hasRelatedWork W3023035490 @default.
- W3148663717 hasRelatedWork W2235837010 @default.
- W3148663717 hasRelatedWork W2928905428 @default.
- W3148663717 isParatext "false" @default.
- W3148663717 isRetracted "false" @default.
- W3148663717 magId "3148663717" @default.
- W3148663717 workType "article" @default.