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- W3161112724 endingPage "2159" @default.
- W3161112724 startingPage "2149" @default.
- W3161112724 created "2021-05-24" @default.
- W3161112724 creator A5061806329 @default.
- W3161112724 creator A5064334690 @default.
- W3161112724 creator A5064579786 @default.
- W3161112724 date "1984-12-01" @default.
- W3161112724 modified "2023-09-26" @default.
- W3161112724 title "SILICONE-BASED NEGATIVE RESIST (SNR) FOR TWO-LAYER RESIST SYSTEM." @default.
- W3161112724 hasPublicationYear "1984" @default.
- W3161112724 type Work @default.
- W3161112724 sameAs 3161112724 @default.
- W3161112724 citedByCount "0" @default.
- W3161112724 crossrefType "journal-article" @default.
- W3161112724 hasAuthorship W3161112724A5061806329 @default.
- W3161112724 hasAuthorship W3161112724A5064334690 @default.
- W3161112724 hasAuthorship W3161112724A5064579786 @default.
- W3161112724 hasConcept C159985019 @default.
- W3161112724 hasConcept C192562407 @default.
- W3161112724 hasConcept C2779227376 @default.
- W3161112724 hasConcept C2779769944 @default.
- W3161112724 hasConcept C53524968 @default.
- W3161112724 hasConceptScore W3161112724C159985019 @default.
- W3161112724 hasConceptScore W3161112724C192562407 @default.
- W3161112724 hasConceptScore W3161112724C2779227376 @default.
- W3161112724 hasConceptScore W3161112724C2779769944 @default.
- W3161112724 hasConceptScore W3161112724C53524968 @default.
- W3161112724 hasIssue "9" @default.
- W3161112724 hasLocation W31611127241 @default.
- W3161112724 hasOpenAccess W3161112724 @default.
- W3161112724 hasPrimaryLocation W31611127241 @default.
- W3161112724 hasRelatedWork W2003711441 @default.
- W3161112724 hasRelatedWork W1524389374 @default.
- W3161112724 hasRelatedWork W2276631077 @default.
- W3161112724 hasRelatedWork W2283710339 @default.
- W3161112724 hasRelatedWork W2749749671 @default.
- W3161112724 hasRelatedWork W2757911985 @default.
- W3161112724 hasRelatedWork W2813913615 @default.
- W3161112724 hasRelatedWork W2816376296 @default.
- W3161112724 hasRelatedWork W2825457301 @default.
- W3161112724 hasRelatedWork W2848205977 @default.
- W3161112724 hasRelatedWork W2855744739 @default.
- W3161112724 hasRelatedWork W2863055701 @default.
- W3161112724 hasRelatedWork W2863692735 @default.
- W3161112724 hasRelatedWork W2869816655 @default.
- W3161112724 hasRelatedWork W2878469294 @default.
- W3161112724 hasRelatedWork W2882748598 @default.
- W3161112724 hasRelatedWork W2882825950 @default.
- W3161112724 hasRelatedWork W2981773988 @default.
- W3161112724 hasRelatedWork W3150248942 @default.
- W3161112724 hasRelatedWork W996544385 @default.
- W3161112724 hasVolume "33" @default.
- W3161112724 isParatext "false" @default.
- W3161112724 isRetracted "false" @default.
- W3161112724 magId "3161112724" @default.
- W3161112724 workType "article" @default.