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- W316859784 endingPage "479" @default.
- W316859784 startingPage "473" @default.
- W316859784 created "2016-06-24" @default.
- W316859784 creator A5031173836 @default.
- W316859784 creator A5045709414 @default.
- W316859784 creator A5077642160 @default.
- W316859784 date "1994-03-25" @default.
- W316859784 modified "2023-09-25" @default.
- W316859784 title "Water Desorption Control of Interlayer Dielectrics to Reduce MOSFET Hot Carrier Degradation (Special Issue on Quarter Micron Si Device and Process Technologies)" @default.
- W316859784 hasPublicationYear "1994" @default.
- W316859784 type Work @default.
- W316859784 sameAs 316859784 @default.
- W316859784 citedByCount "0" @default.
- W316859784 crossrefType "journal-article" @default.
- W316859784 hasAuthorship W316859784A5031173836 @default.
- W316859784 hasAuthorship W316859784A5045709414 @default.
- W316859784 hasAuthorship W316859784A5077642160 @default.
- W316859784 hasConcept C111919701 @default.
- W316859784 hasConcept C119599485 @default.
- W316859784 hasConcept C127413603 @default.
- W316859784 hasConcept C133386390 @default.
- W316859784 hasConcept C150394285 @default.
- W316859784 hasConcept C162711632 @default.
- W316859784 hasConcept C165801399 @default.
- W316859784 hasConcept C166957645 @default.
- W316859784 hasConcept C172385210 @default.
- W316859784 hasConcept C178790620 @default.
- W316859784 hasConcept C185592680 @default.
- W316859784 hasConcept C192562407 @default.
- W316859784 hasConcept C24326235 @default.
- W316859784 hasConcept C2778413303 @default.
- W316859784 hasConcept C2779679103 @default.
- W316859784 hasConcept C41008148 @default.
- W316859784 hasConcept C49040817 @default.
- W316859784 hasConcept C61696701 @default.
- W316859784 hasConcept C85079727 @default.
- W316859784 hasConcept C95457728 @default.
- W316859784 hasConcept C98045186 @default.
- W316859784 hasConceptScore W316859784C111919701 @default.
- W316859784 hasConceptScore W316859784C119599485 @default.
- W316859784 hasConceptScore W316859784C127413603 @default.
- W316859784 hasConceptScore W316859784C133386390 @default.
- W316859784 hasConceptScore W316859784C150394285 @default.
- W316859784 hasConceptScore W316859784C162711632 @default.
- W316859784 hasConceptScore W316859784C165801399 @default.
- W316859784 hasConceptScore W316859784C166957645 @default.
- W316859784 hasConceptScore W316859784C172385210 @default.
- W316859784 hasConceptScore W316859784C178790620 @default.
- W316859784 hasConceptScore W316859784C185592680 @default.
- W316859784 hasConceptScore W316859784C192562407 @default.
- W316859784 hasConceptScore W316859784C24326235 @default.
- W316859784 hasConceptScore W316859784C2778413303 @default.
- W316859784 hasConceptScore W316859784C2779679103 @default.
- W316859784 hasConceptScore W316859784C41008148 @default.
- W316859784 hasConceptScore W316859784C49040817 @default.
- W316859784 hasConceptScore W316859784C61696701 @default.
- W316859784 hasConceptScore W316859784C85079727 @default.
- W316859784 hasConceptScore W316859784C95457728 @default.
- W316859784 hasConceptScore W316859784C98045186 @default.
- W316859784 hasIssue "3" @default.
- W316859784 hasLocation W3168597841 @default.
- W316859784 hasOpenAccess W316859784 @default.
- W316859784 hasPrimaryLocation W3168597841 @default.
- W316859784 hasRelatedWork W1538848875 @default.
- W316859784 hasRelatedWork W1538997741 @default.
- W316859784 hasRelatedWork W1567391709 @default.
- W316859784 hasRelatedWork W1574230430 @default.
- W316859784 hasRelatedWork W1592769681 @default.
- W316859784 hasRelatedWork W1596457640 @default.
- W316859784 hasRelatedWork W2007102365 @default.
- W316859784 hasRelatedWork W2031598211 @default.
- W316859784 hasRelatedWork W2038953727 @default.
- W316859784 hasRelatedWork W2095360275 @default.
- W316859784 hasRelatedWork W2097675351 @default.
- W316859784 hasRelatedWork W2108445218 @default.
- W316859784 hasRelatedWork W2120189074 @default.
- W316859784 hasRelatedWork W2142511064 @default.
- W316859784 hasRelatedWork W2149579598 @default.
- W316859784 hasRelatedWork W2150508525 @default.
- W316859784 hasRelatedWork W2153034312 @default.
- W316859784 hasRelatedWork W2154032027 @default.
- W316859784 hasRelatedWork W3014552206 @default.
- W316859784 hasRelatedWork W2137964738 @default.
- W316859784 hasVolume "77" @default.
- W316859784 isParatext "false" @default.
- W316859784 isRetracted "false" @default.
- W316859784 magId "316859784" @default.
- W316859784 workType "article" @default.