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- W37578404 created "2016-06-24" @default.
- W37578404 creator A5030560677 @default.
- W37578404 creator A5056360703 @default.
- W37578404 creator A5078535137 @default.
- W37578404 date "2007-10-02" @default.
- W37578404 modified "2023-09-23" @default.
- W37578404 title "Negative Ions and Neutral Beams in Plasma Etching" @default.
- W37578404 hasPublicationYear "2007" @default.
- W37578404 type Work @default.
- W37578404 sameAs 37578404 @default.
- W37578404 citedByCount "0" @default.
- W37578404 crossrefType "journal-article" @default.
- W37578404 hasAuthorship W37578404A5030560677 @default.
- W37578404 hasAuthorship W37578404A5056360703 @default.
- W37578404 hasAuthorship W37578404A5078535137 @default.
- W37578404 hasConcept C100460472 @default.
- W37578404 hasConcept C107187091 @default.
- W37578404 hasConcept C121332964 @default.
- W37578404 hasConcept C145148216 @default.
- W37578404 hasConcept C171250308 @default.
- W37578404 hasConcept C184779094 @default.
- W37578404 hasConcept C185544564 @default.
- W37578404 hasConcept C192562407 @default.
- W37578404 hasConcept C2779227376 @default.
- W37578404 hasConcept C62520636 @default.
- W37578404 hasConcept C82706917 @default.
- W37578404 hasConceptScore W37578404C100460472 @default.
- W37578404 hasConceptScore W37578404C107187091 @default.
- W37578404 hasConceptScore W37578404C121332964 @default.
- W37578404 hasConceptScore W37578404C145148216 @default.
- W37578404 hasConceptScore W37578404C171250308 @default.
- W37578404 hasConceptScore W37578404C184779094 @default.
- W37578404 hasConceptScore W37578404C185544564 @default.
- W37578404 hasConceptScore W37578404C192562407 @default.
- W37578404 hasConceptScore W37578404C2779227376 @default.
- W37578404 hasConceptScore W37578404C62520636 @default.
- W37578404 hasConceptScore W37578404C82706917 @default.
- W37578404 hasLocation W375784041 @default.
- W37578404 hasOpenAccess W37578404 @default.
- W37578404 hasPrimaryLocation W375784041 @default.
- W37578404 hasRelatedWork W1991522630 @default.
- W37578404 hasRelatedWork W1995344598 @default.
- W37578404 hasRelatedWork W1996151752 @default.
- W37578404 hasRelatedWork W1999790973 @default.
- W37578404 hasRelatedWork W2036636849 @default.
- W37578404 hasRelatedWork W2052554785 @default.
- W37578404 hasRelatedWork W2055369081 @default.
- W37578404 hasRelatedWork W2065253127 @default.
- W37578404 hasRelatedWork W2070372698 @default.
- W37578404 hasRelatedWork W2094001320 @default.
- W37578404 hasRelatedWork W2169735171 @default.
- W37578404 hasRelatedWork W2249929346 @default.
- W37578404 hasRelatedWork W2317197132 @default.
- W37578404 hasRelatedWork W264560464 @default.
- W37578404 hasRelatedWork W2945569525 @default.
- W37578404 hasRelatedWork W3110987745 @default.
- W37578404 hasRelatedWork W3192870631 @default.
- W37578404 hasRelatedWork W3199427537 @default.
- W37578404 hasRelatedWork W2406983580 @default.
- W37578404 hasRelatedWork W3082234029 @default.
- W37578404 isParatext "false" @default.
- W37578404 isRetracted "false" @default.
- W37578404 magId "37578404" @default.
- W37578404 workType "article" @default.