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- W389314225 date "1987-01-01" @default.
- W389314225 modified "2023-09-24" @default.
- W389314225 title "金属／Ｓｉ界面反応のＡＥＳとＤＡＰＳによる観察 Ｔｉ／Ｓｉ（１１１）とＴｉ／ＳｉＯ２／Ｓｉ（１１１）の比較:Ti/Si (111) とTi/SiO 2 /Si (111) の比較" @default.
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