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- W4214973747 created "2022-03-05" @default.
- W4214973747 creator A5001365155 @default.
- W4214973747 creator A5002213359 @default.
- W4214973747 creator A5003201520 @default.
- W4214973747 creator A5006683177 @default.
- W4214973747 creator A5014155715 @default.
- W4214973747 creator A5024518101 @default.
- W4214973747 creator A5026303492 @default.
- W4214973747 creator A5035788484 @default.
- W4214973747 creator A5038060559 @default.
- W4214973747 creator A5038086739 @default.
- W4214973747 creator A5053543537 @default.
- W4214973747 creator A5057747656 @default.
- W4214973747 creator A5059394196 @default.
- W4214973747 creator A5070087568 @default.
- W4214973747 creator A5070514925 @default.
- W4214973747 date "2007-01-01" @default.
- W4214973747 modified "2023-10-15" @default.
- W4214973747 title "Integration and characterization of gas cluster processing for copper interconnects electromigration improvement" @default.
- W4214973747 hasPublicationYear "2007" @default.
- W4214973747 type Work @default.
- W4214973747 citedByCount "0" @default.
- W4214973747 crossrefType "journal-article" @default.
- W4214973747 hasAuthorship W4214973747A5001365155 @default.
- W4214973747 hasAuthorship W4214973747A5002213359 @default.
- W4214973747 hasAuthorship W4214973747A5003201520 @default.
- W4214973747 hasAuthorship W4214973747A5006683177 @default.
- W4214973747 hasAuthorship W4214973747A5014155715 @default.
- W4214973747 hasAuthorship W4214973747A5024518101 @default.
- W4214973747 hasAuthorship W4214973747A5026303492 @default.
- W4214973747 hasAuthorship W4214973747A5035788484 @default.
- W4214973747 hasAuthorship W4214973747A5038060559 @default.
- W4214973747 hasAuthorship W4214973747A5038086739 @default.
- W4214973747 hasAuthorship W4214973747A5053543537 @default.
- W4214973747 hasAuthorship W4214973747A5057747656 @default.
- W4214973747 hasAuthorship W4214973747A5059394196 @default.
- W4214973747 hasAuthorship W4214973747A5070087568 @default.
- W4214973747 hasAuthorship W4214973747A5070514925 @default.
- W4214973747 hasConcept C111919701 @default.
- W4214973747 hasConcept C116372231 @default.
- W4214973747 hasConcept C138055206 @default.
- W4214973747 hasConcept C159985019 @default.
- W4214973747 hasConcept C164866538 @default.
- W4214973747 hasConcept C171250308 @default.
- W4214973747 hasConcept C191897082 @default.
- W4214973747 hasConcept C192562407 @default.
- W4214973747 hasConcept C2780841128 @default.
- W4214973747 hasConcept C41008148 @default.
- W4214973747 hasConcept C49040817 @default.
- W4214973747 hasConcept C544778455 @default.
- W4214973747 hasConceptScore W4214973747C111919701 @default.
- W4214973747 hasConceptScore W4214973747C116372231 @default.
- W4214973747 hasConceptScore W4214973747C138055206 @default.
- W4214973747 hasConceptScore W4214973747C159985019 @default.
- W4214973747 hasConceptScore W4214973747C164866538 @default.
- W4214973747 hasConceptScore W4214973747C171250308 @default.
- W4214973747 hasConceptScore W4214973747C191897082 @default.
- W4214973747 hasConceptScore W4214973747C192562407 @default.
- W4214973747 hasConceptScore W4214973747C2780841128 @default.
- W4214973747 hasConceptScore W4214973747C41008148 @default.
- W4214973747 hasConceptScore W4214973747C49040817 @default.
- W4214973747 hasConceptScore W4214973747C544778455 @default.
- W4214973747 hasLocation W42149737471 @default.
- W4214973747 hasLocation W42149737472 @default.
- W4214973747 hasOpenAccess W4214973747 @default.
- W4214973747 hasPrimaryLocation W42149737471 @default.
- W4214973747 hasRelatedWork W1976947690 @default.
- W4214973747 hasRelatedWork W1982820757 @default.
- W4214973747 hasRelatedWork W1994213108 @default.
- W4214973747 hasRelatedWork W2039036129 @default.
- W4214973747 hasRelatedWork W2075171636 @default.
- W4214973747 hasRelatedWork W2082831914 @default.
- W4214973747 hasRelatedWork W2106480950 @default.
- W4214973747 hasRelatedWork W2128384320 @default.
- W4214973747 hasRelatedWork W2129541220 @default.
- W4214973747 hasRelatedWork W2154887827 @default.
- W4214973747 isParatext "false" @default.
- W4214973747 isRetracted "false" @default.
- W4214973747 workType "article" @default.