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• W4224132592 created "2022-04-20" @default.
• W4224132592 creator A5013801214 @default.
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• W4224132592 date "2022-04-18" @default.
• W4224132592 modified "2023-09-27" @default.
• W4224132592 title "Comparative <i>In Situ</i> Study of the Initial Growth Trends of Atomic Layer-Deposited Al₂O₃ Films" @default.
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• W4224132592 doi "https://doi.org/10.1021/acs.jpcc.2c01033" @default.
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