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- W4224135805 date "2022-04-16" @default.
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- W4224135805 title "Influence of nitrogen concentration on electrical, mechanical, and structural properties of tantalum nitride thin films prepared via DC magnetron sputtering" @default.
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- W4224135805 doi "https://doi.org/10.1007/s00339-022-05501-4" @default.
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