Matches in SemOpenAlex for { <https://semopenalex.org/work/W4229604249> ?p ?o ?g. }
Showing items 1 to 55 of
55
with 100 items per page.
- W4229604249 endingPage "271" @default.
- W4229604249 startingPage "271" @default.
- W4229604249 created "2022-05-11" @default.
- W4229604249 date "1975-06-01" @default.
- W4229604249 modified "2023-09-27" @default.
- W4229604249 title "Design of polymer resists for electron lithography" @default.
- W4229604249 doi "https://doi.org/10.1016/0026-2714(75)90567-3" @default.
- W4229604249 hasPublicationYear "1975" @default.
- W4229604249 type Work @default.
- W4229604249 citedByCount "0" @default.
- W4229604249 crossrefType "journal-article" @default.
- W4229604249 hasConcept C121332964 @default.
- W4229604249 hasConcept C147120987 @default.
- W4229604249 hasConcept C159985019 @default.
- W4229604249 hasConcept C171250308 @default.
- W4229604249 hasConcept C185544564 @default.
- W4229604249 hasConcept C192562407 @default.
- W4229604249 hasConcept C200274948 @default.
- W4229604249 hasConcept C204223013 @default.
- W4229604249 hasConcept C2779227376 @default.
- W4229604249 hasConcept C41794268 @default.
- W4229604249 hasConcept C49040817 @default.
- W4229604249 hasConcept C521977710 @default.
- W4229604249 hasConcept C53524968 @default.
- W4229604249 hasConceptScore W4229604249C121332964 @default.
- W4229604249 hasConceptScore W4229604249C147120987 @default.
- W4229604249 hasConceptScore W4229604249C159985019 @default.
- W4229604249 hasConceptScore W4229604249C171250308 @default.
- W4229604249 hasConceptScore W4229604249C185544564 @default.
- W4229604249 hasConceptScore W4229604249C192562407 @default.
- W4229604249 hasConceptScore W4229604249C200274948 @default.
- W4229604249 hasConceptScore W4229604249C204223013 @default.
- W4229604249 hasConceptScore W4229604249C2779227376 @default.
- W4229604249 hasConceptScore W4229604249C41794268 @default.
- W4229604249 hasConceptScore W4229604249C49040817 @default.
- W4229604249 hasConceptScore W4229604249C521977710 @default.
- W4229604249 hasConceptScore W4229604249C53524968 @default.
- W4229604249 hasIssue "3" @default.
- W4229604249 hasLocation W42296042491 @default.
- W4229604249 hasOpenAccess W4229604249 @default.
- W4229604249 hasPrimaryLocation W42296042491 @default.
- W4229604249 hasRelatedWork W1573821668 @default.
- W4229604249 hasRelatedWork W1989745908 @default.
- W4229604249 hasRelatedWork W2017998388 @default.
- W4229604249 hasRelatedWork W2055565127 @default.
- W4229604249 hasRelatedWork W2061718516 @default.
- W4229604249 hasRelatedWork W2092404174 @default.
- W4229604249 hasRelatedWork W2147463886 @default.
- W4229604249 hasRelatedWork W4236461539 @default.
- W4229604249 hasRelatedWork W573585812 @default.
- W4229604249 hasRelatedWork W1584753432 @default.
- W4229604249 hasVolume "14" @default.
- W4229604249 isParatext "false" @default.
- W4229604249 isRetracted "false" @default.
- W4229604249 workType "article" @default.