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Matches in SemOpenAlex for { <https://semopenalex.org/work/W4234074623> ?p ?o ?g. }

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• W4234074623 date "2019-01-01" @default.
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• W4234074623 title "Correlating Shear Force and Coefficient of Friction to Platen Motor Current in Copper, Cobalt, and Shallow Trench Isolation Chemical Mechanical Planarization at Highly Non-Steady-State Conditions" @default.
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