Matches in SemOpenAlex for { <https://semopenalex.org/work/W4236026046> ?p ?o ?g. }
Showing items 1 to 60 of
60
with 100 items per page.
- W4236026046 created "2022-05-12" @default.
- W4236026046 date "2012-01-01" @default.
- W4236026046 modified "2023-10-18" @default.
- W4236026046 title "Atomic Layer Deposition of Ruthenium in Various Precursor and Oxygen Doses" @default.
- W4236026046 doi "https://doi.org/10.1149/ma2012-02/28/2477" @default.
- W4236026046 hasPublicationYear "2012" @default.
- W4236026046 type Work @default.
- W4236026046 citedByCount "0" @default.
- W4236026046 crossrefType "journal-article" @default.
- W4236026046 hasBestOaLocation W42360260461 @default.
- W4236026046 hasConcept C127313418 @default.
- W4236026046 hasConcept C127413603 @default.
- W4236026046 hasConcept C151730666 @default.
- W4236026046 hasConcept C161790260 @default.
- W4236026046 hasConcept C171250308 @default.
- W4236026046 hasConcept C178790620 @default.
- W4236026046 hasConcept C179104552 @default.
- W4236026046 hasConcept C185592680 @default.
- W4236026046 hasConcept C192562407 @default.
- W4236026046 hasConcept C2779227376 @default.
- W4236026046 hasConcept C2816523 @default.
- W4236026046 hasConcept C2983054736 @default.
- W4236026046 hasConcept C42360764 @default.
- W4236026046 hasConcept C540031477 @default.
- W4236026046 hasConcept C555196967 @default.
- W4236026046 hasConcept C64297162 @default.
- W4236026046 hasConcept C69544855 @default.
- W4236026046 hasConceptScore W4236026046C127313418 @default.
- W4236026046 hasConceptScore W4236026046C127413603 @default.
- W4236026046 hasConceptScore W4236026046C151730666 @default.
- W4236026046 hasConceptScore W4236026046C161790260 @default.
- W4236026046 hasConceptScore W4236026046C171250308 @default.
- W4236026046 hasConceptScore W4236026046C178790620 @default.
- W4236026046 hasConceptScore W4236026046C179104552 @default.
- W4236026046 hasConceptScore W4236026046C185592680 @default.
- W4236026046 hasConceptScore W4236026046C192562407 @default.
- W4236026046 hasConceptScore W4236026046C2779227376 @default.
- W4236026046 hasConceptScore W4236026046C2816523 @default.
- W4236026046 hasConceptScore W4236026046C2983054736 @default.
- W4236026046 hasConceptScore W4236026046C42360764 @default.
- W4236026046 hasConceptScore W4236026046C540031477 @default.
- W4236026046 hasConceptScore W4236026046C555196967 @default.
- W4236026046 hasConceptScore W4236026046C64297162 @default.
- W4236026046 hasConceptScore W4236026046C69544855 @default.
- W4236026046 hasLocation W42360260461 @default.
- W4236026046 hasOpenAccess W4236026046 @default.
- W4236026046 hasPrimaryLocation W42360260461 @default.
- W4236026046 hasRelatedWork W11505185 @default.
- W4236026046 hasRelatedWork W13531388 @default.
- W4236026046 hasRelatedWork W14772009 @default.
- W4236026046 hasRelatedWork W18428054 @default.
- W4236026046 hasRelatedWork W20563483 @default.
- W4236026046 hasRelatedWork W21006802 @default.
- W4236026046 hasRelatedWork W2217251 @default.
- W4236026046 hasRelatedWork W2844122 @default.
- W4236026046 hasRelatedWork W4255155 @default.
- W4236026046 hasRelatedWork W24244732 @default.
- W4236026046 isParatext "false" @default.
- W4236026046 isRetracted "false" @default.
- W4236026046 workType "article" @default.