Matches in SemOpenAlex for { <https://semopenalex.org/work/W4237020175> ?p ?o ?g. }
Showing items 1 to 55 of
55
with 100 items per page.
- W4237020175 created "2022-05-12" @default.
- W4237020175 creator A5002455478 @default.
- W4237020175 creator A5005544935 @default.
- W4237020175 creator A5008496404 @default.
- W4237020175 creator A5049885308 @default.
- W4237020175 creator A5079133821 @default.
- W4237020175 date "2005-01-01" @default.
- W4237020175 modified "2023-09-27" @default.
- W4237020175 title "Improved image resolution for wafer inspection tool using sub-200 nm wavelength (DUV light) light optical system" @default.
- W4237020175 doi "https://doi.org/10.1109/imnc.2005.203725" @default.
- W4237020175 hasPublicationYear "2005" @default.
- W4237020175 type Work @default.
- W4237020175 citedByCount "0" @default.
- W4237020175 crossrefType "proceedings-article" @default.
- W4237020175 hasAuthorship W4237020175A5002455478 @default.
- W4237020175 hasAuthorship W4237020175A5005544935 @default.
- W4237020175 hasAuthorship W4237020175A5008496404 @default.
- W4237020175 hasAuthorship W4237020175A5049885308 @default.
- W4237020175 hasAuthorship W4237020175A5079133821 @default.
- W4237020175 hasConcept C120665830 @default.
- W4237020175 hasConcept C121332964 @default.
- W4237020175 hasConcept C138268822 @default.
- W4237020175 hasConcept C154945302 @default.
- W4237020175 hasConcept C160671074 @default.
- W4237020175 hasConcept C192562407 @default.
- W4237020175 hasConcept C205372480 @default.
- W4237020175 hasConcept C41008148 @default.
- W4237020175 hasConcept C49040817 @default.
- W4237020175 hasConcept C6260449 @default.
- W4237020175 hasConceptScore W4237020175C120665830 @default.
- W4237020175 hasConceptScore W4237020175C121332964 @default.
- W4237020175 hasConceptScore W4237020175C138268822 @default.
- W4237020175 hasConceptScore W4237020175C154945302 @default.
- W4237020175 hasConceptScore W4237020175C160671074 @default.
- W4237020175 hasConceptScore W4237020175C192562407 @default.
- W4237020175 hasConceptScore W4237020175C205372480 @default.
- W4237020175 hasConceptScore W4237020175C41008148 @default.
- W4237020175 hasConceptScore W4237020175C49040817 @default.
- W4237020175 hasConceptScore W4237020175C6260449 @default.
- W4237020175 hasLocation W42370201751 @default.
- W4237020175 hasOpenAccess W4237020175 @default.
- W4237020175 hasPrimaryLocation W42370201751 @default.
- W4237020175 hasRelatedWork W1998775113 @default.
- W4237020175 hasRelatedWork W2009328880 @default.
- W4237020175 hasRelatedWork W2017853288 @default.
- W4237020175 hasRelatedWork W2035326386 @default.
- W4237020175 hasRelatedWork W2056500845 @default.
- W4237020175 hasRelatedWork W2063900735 @default.
- W4237020175 hasRelatedWork W2067201768 @default.
- W4237020175 hasRelatedWork W2102933082 @default.
- W4237020175 hasRelatedWork W2296336181 @default.
- W4237020175 hasRelatedWork W3009146852 @default.
- W4237020175 isParatext "false" @default.
- W4237020175 isRetracted "false" @default.
- W4237020175 workType "article" @default.