Matches in SemOpenAlex for { <https://semopenalex.org/work/W4239485203> ?p ?o ?g. }
Showing items 1 to 56 of
56
with 100 items per page.
- W4239485203 created "2022-05-12" @default.
- W4239485203 date "2008-01-01" @default.
- W4239485203 modified "2023-09-26" @default.
- W4239485203 title "Silicon Dry Etching Process for High Topography Sub-micro and Nano-devices" @default.
- W4239485203 doi "https://doi.org/10.1149/ma2008-02/51/3164" @default.
- W4239485203 hasPublicationYear "2008" @default.
- W4239485203 type Work @default.
- W4239485203 citedByCount "0" @default.
- W4239485203 crossrefType "journal-article" @default.
- W4239485203 hasBestOaLocation W42394852031 @default.
- W4239485203 hasConcept C100460472 @default.
- W4239485203 hasConcept C111919701 @default.
- W4239485203 hasConcept C127413603 @default.
- W4239485203 hasConcept C1291036 @default.
- W4239485203 hasConcept C159985019 @default.
- W4239485203 hasConcept C171250308 @default.
- W4239485203 hasConcept C192562407 @default.
- W4239485203 hasConcept C2779227376 @default.
- W4239485203 hasConcept C2780357685 @default.
- W4239485203 hasConcept C2992201701 @default.
- W4239485203 hasConcept C41008148 @default.
- W4239485203 hasConcept C49040817 @default.
- W4239485203 hasConcept C544956773 @default.
- W4239485203 hasConcept C548081761 @default.
- W4239485203 hasConcept C98045186 @default.
- W4239485203 hasConceptScore W4239485203C100460472 @default.
- W4239485203 hasConceptScore W4239485203C111919701 @default.
- W4239485203 hasConceptScore W4239485203C127413603 @default.
- W4239485203 hasConceptScore W4239485203C1291036 @default.
- W4239485203 hasConceptScore W4239485203C159985019 @default.
- W4239485203 hasConceptScore W4239485203C171250308 @default.
- W4239485203 hasConceptScore W4239485203C192562407 @default.
- W4239485203 hasConceptScore W4239485203C2779227376 @default.
- W4239485203 hasConceptScore W4239485203C2780357685 @default.
- W4239485203 hasConceptScore W4239485203C2992201701 @default.
- W4239485203 hasConceptScore W4239485203C41008148 @default.
- W4239485203 hasConceptScore W4239485203C49040817 @default.
- W4239485203 hasConceptScore W4239485203C544956773 @default.
- W4239485203 hasConceptScore W4239485203C548081761 @default.
- W4239485203 hasConceptScore W4239485203C98045186 @default.
- W4239485203 hasLocation W42394852031 @default.
- W4239485203 hasOpenAccess W4239485203 @default.
- W4239485203 hasPrimaryLocation W42394852031 @default.
- W4239485203 hasRelatedWork W1584171941 @default.
- W4239485203 hasRelatedWork W1964216914 @default.
- W4239485203 hasRelatedWork W1967627355 @default.
- W4239485203 hasRelatedWork W2044366676 @default.
- W4239485203 hasRelatedWork W2076232815 @default.
- W4239485203 hasRelatedWork W2123370244 @default.
- W4239485203 hasRelatedWork W2360631777 @default.
- W4239485203 hasRelatedWork W2778945603 @default.
- W4239485203 hasRelatedWork W2923172560 @default.
- W4239485203 hasRelatedWork W2999885668 @default.
- W4239485203 isParatext "false" @default.
- W4239485203 isRetracted "false" @default.
- W4239485203 workType "article" @default.