FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W4241572242> ?p ?o ?g. }

• W4241572242 endingPage "026201" @default.
• W4241572242 startingPage "026201" @default.
• W4241572242 created "2022-05-12" @default.
• W4241572242 creator A5006676797 @default.
• W4241572242 creator A5015686190 @default.
• W4241572242 creator A5023413228 @default.
• W4241572242 creator A5033650757 @default.
• W4241572242 creator A5039442513 @default.
• W4241572242 creator A5047782314 @default.
• W4241572242 creator A5055815371 @default.
• W4241572242 creator A5058786365 @default.
• W4241572242 creator A5061563484 @default.
• W4241572242 creator A5074043450 @default.
• W4241572242 creator A5078025788 @default.
• W4241572242 creator A5082735601 @default.
• W4241572242 creator A5091853924 @default.
• W4241572242 date "2012-02-01" @default.
• W4241572242 modified "2023-09-25" @default.
• W4241572242 title "Vacuum Ultraviolet and Ultraviolet Radiation-Induced Effect of Hydrogenated Silicon Nitride Etching: Surface Reaction Enhancement and Damage Generation" @default.
• W4241572242 cites W1528413916 @default.
• W4241572242 cites W1618911772 @default.
• W4241572242 cites W1970765017 @default.
• W4241572242 cites W1973061894 @default.
• W4241572242 cites W1978694105 @default.
• W4241572242 cites W1995328449 @default.
• W4241572242 cites W1997456708 @default.
• W4241572242 cites W2004234572 @default.
• W4241572242 cites W2005042798 @default.
• W4241572242 cites W2013225141 @default.
• W4241572242 cites W2023853032 @default.
• W4241572242 cites W2039574057 @default.
• W4241572242 cites W2048536636 @default.
• W4241572242 cites W2048551646 @default.
• W4241572242 cites W2055295989 @default.
• W4241572242 cites W2062278136 @default.
• W4241572242 cites W2092826033 @default.
• W4241572242 cites W2093000238 @default.
• W4241572242 cites W2093863666 @default.
• W4241572242 cites W2134295556 @default.
• W4241572242 cites W2172065341 @default.
• W4241572242 cites W4240508115 @default.
• W4241572242 doi "https://doi.org/10.7567/jjap.51.026201" @default.
• W4241572242 hasPublicationYear "2012" @default.
• W4241572242 type Work @default.
• W4241572242 citedByCount "5" @default.
• W4241572242 countsByYear W42415722422015 @default.
• W4241572242 countsByYear W42415722422016 @default.
• W4241572242 countsByYear W42415722422017 @default.
• W4241572242 countsByYear W42415722422019 @default.
• W4241572242 crossrefType "journal-article" @default.
• W4241572242 hasAuthorship W4241572242A5006676797 @default.
• W4241572242 hasAuthorship W4241572242A5015686190 @default.
• W4241572242 hasAuthorship W4241572242A5023413228 @default.
• W4241572242 hasAuthorship W4241572242A5033650757 @default.
• W4241572242 hasAuthorship W4241572242A5039442513 @default.
• W4241572242 hasAuthorship W4241572242A5047782314 @default.
• W4241572242 hasAuthorship W4241572242A5055815371 @default.
• W4241572242 hasAuthorship W4241572242A5058786365 @default.
• W4241572242 hasAuthorship W4241572242A5061563484 @default.
• W4241572242 hasAuthorship W4241572242A5074043450 @default.
• W4241572242 hasAuthorship W4241572242A5078025788 @default.
• W4241572242 hasAuthorship W4241572242A5082735601 @default.
• W4241572242 hasAuthorship W4241572242A5091853924 @default.
• W4241572242 hasConcept C100460472 @default.
• W4241572242 hasConcept C120665830 @default.
• W4241572242 hasConcept C121332964 @default.
• W4241572242 hasConcept C153385146 @default.
• W4241572242 hasConcept C16005928 @default.
• W4241572242 hasConcept C171250308 @default.
• W4241572242 hasConcept C177322064 @default.
• W4241572242 hasConcept C185592680 @default.
• W4241572242 hasConcept C192562407 @default.
• W4241572242 hasConcept C194760766 @default.
• W4241572242 hasConcept C2776798109 @default.
• W4241572242 hasConcept C2777431650 @default.
• W4241572242 hasConcept C2779227376 @default.
• W4241572242 hasConcept C2987742019 @default.
• W4241572242 hasConcept C2992916681 @default.
• W4241572242 hasConcept C3017420807 @default.
• W4241572242 hasConcept C49040817 @default.
• W4241572242 hasConcept C544956773 @default.
• W4241572242 hasConcept C71924100 @default.
• W4241572242 hasConceptScore W4241572242C100460472 @default.
• W4241572242 hasConceptScore W4241572242C120665830 @default.
• W4241572242 hasConceptScore W4241572242C121332964 @default.
• W4241572242 hasConceptScore W4241572242C153385146 @default.
• W4241572242 hasConceptScore W4241572242C16005928 @default.
• W4241572242 hasConceptScore W4241572242C171250308 @default.
• W4241572242 hasConceptScore W4241572242C177322064 @default.
• W4241572242 hasConceptScore W4241572242C185592680 @default.
• W4241572242 hasConceptScore W4241572242C192562407 @default.
• W4241572242 hasConceptScore W4241572242C194760766 @default.
• W4241572242 hasConceptScore W4241572242C2776798109 @default.
• W4241572242 hasConceptScore W4241572242C2777431650 @default.
• W4241572242 hasConceptScore W4241572242C2779227376 @default.
• W4241572242 hasConceptScore W4241572242C2987742019 @default.
• W4241572242 hasConceptScore W4241572242C2992916681 @default.
• W4241572242 hasConceptScore W4241572242C3017420807 @default.
• W4241572242 hasConceptScore W4241572242C49040817 @default.
• W4241572242 hasConceptScore W4241572242C544956773 @default.

• next