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- W4242357119 created "2022-05-12" @default.
- W4242357119 date "2007-01-01" @default.
- W4242357119 modified "2023-09-25" @default.
- W4242357119 title "Large Scaled ALD/PECVD Reactor for Flat Panel Display Application" @default.
- W4242357119 doi "https://doi.org/10.1149/ma2007-02/17/976" @default.
- W4242357119 hasPublicationYear "2007" @default.
- W4242357119 type Work @default.
- W4242357119 citedByCount "0" @default.
- W4242357119 crossrefType "journal-article" @default.
- W4242357119 hasBestOaLocation W42423571191 @default.
- W4242357119 hasConcept C121332964 @default.
- W4242357119 hasConcept C121684516 @default.
- W4242357119 hasConcept C17525397 @default.
- W4242357119 hasConcept C192562407 @default.
- W4242357119 hasConcept C197489587 @default.
- W4242357119 hasConcept C3018441589 @default.
- W4242357119 hasConcept C38347018 @default.
- W4242357119 hasConcept C41008148 @default.
- W4242357119 hasConcept C49040817 @default.
- W4242357119 hasConcept C57410435 @default.
- W4242357119 hasConcept C62520636 @default.
- W4242357119 hasConceptScore W4242357119C121332964 @default.
- W4242357119 hasConceptScore W4242357119C121684516 @default.
- W4242357119 hasConceptScore W4242357119C17525397 @default.
- W4242357119 hasConceptScore W4242357119C192562407 @default.
- W4242357119 hasConceptScore W4242357119C197489587 @default.
- W4242357119 hasConceptScore W4242357119C3018441589 @default.
- W4242357119 hasConceptScore W4242357119C38347018 @default.
- W4242357119 hasConceptScore W4242357119C41008148 @default.
- W4242357119 hasConceptScore W4242357119C49040817 @default.
- W4242357119 hasConceptScore W4242357119C57410435 @default.
- W4242357119 hasConceptScore W4242357119C62520636 @default.
- W4242357119 hasLocation W42423571191 @default.
- W4242357119 hasOpenAccess W4242357119 @default.
- W4242357119 hasPrimaryLocation W42423571191 @default.
- W4242357119 hasRelatedWork W2058676402 @default.
- W4242357119 hasRelatedWork W2189274616 @default.
- W4242357119 hasRelatedWork W2380666625 @default.
- W4242357119 hasRelatedWork W2381002821 @default.
- W4242357119 hasRelatedWork W2399397734 @default.
- W4242357119 hasRelatedWork W2625645813 @default.
- W4242357119 hasRelatedWork W2899084033 @default.
- W4242357119 hasRelatedWork W2902546961 @default.
- W4242357119 hasRelatedWork W2917004141 @default.
- W4242357119 hasRelatedWork W4242357119 @default.
- W4242357119 isParatext "false" @default.
- W4242357119 isRetracted "false" @default.
- W4242357119 workType "article" @default.