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- W4243593412 endingPage "3" @default.
- W4243593412 startingPage "1" @default.
- W4243593412 created "2022-05-12" @default.
- W4243593412 creator A5013554595 @default.
- W4243593412 date "1995-06-01" @default.
- W4243593412 modified "2023-09-27" @default.
- W4243593412 title "Thin SiO2 growth by combined rapid thermal and plasma processing" @default.
- W4243593412 doi "https://doi.org/10.1016/0040-6090(95)09483-0" @default.
- W4243593412 hasPublicationYear "1995" @default.
- W4243593412 type Work @default.
- W4243593412 citedByCount "0" @default.
- W4243593412 crossrefType "journal-article" @default.
- W4243593412 hasAuthorship W4243593412A5013554595 @default.
- W4243593412 hasConcept C121332964 @default.
- W4243593412 hasConcept C127413603 @default.
- W4243593412 hasConcept C145738678 @default.
- W4243593412 hasConcept C171250308 @default.
- W4243593412 hasConcept C185592680 @default.
- W4243593412 hasConcept C19067145 @default.
- W4243593412 hasConcept C191897082 @default.
- W4243593412 hasConcept C192562407 @default.
- W4243593412 hasConcept C199289684 @default.
- W4243593412 hasConcept C204530211 @default.
- W4243593412 hasConcept C42360764 @default.
- W4243593412 hasConcept C544956773 @default.
- W4243593412 hasConcept C62520636 @default.
- W4243593412 hasConcept C72832162 @default.
- W4243593412 hasConcept C82706917 @default.
- W4243593412 hasConcept C97355855 @default.
- W4243593412 hasConceptScore W4243593412C121332964 @default.
- W4243593412 hasConceptScore W4243593412C127413603 @default.
- W4243593412 hasConceptScore W4243593412C145738678 @default.
- W4243593412 hasConceptScore W4243593412C171250308 @default.
- W4243593412 hasConceptScore W4243593412C185592680 @default.
- W4243593412 hasConceptScore W4243593412C19067145 @default.
- W4243593412 hasConceptScore W4243593412C191897082 @default.
- W4243593412 hasConceptScore W4243593412C192562407 @default.
- W4243593412 hasConceptScore W4243593412C199289684 @default.
- W4243593412 hasConceptScore W4243593412C204530211 @default.
- W4243593412 hasConceptScore W4243593412C42360764 @default.
- W4243593412 hasConceptScore W4243593412C544956773 @default.
- W4243593412 hasConceptScore W4243593412C62520636 @default.
- W4243593412 hasConceptScore W4243593412C72832162 @default.
- W4243593412 hasConceptScore W4243593412C82706917 @default.
- W4243593412 hasConceptScore W4243593412C97355855 @default.
- W4243593412 hasIssue "1-2" @default.
- W4243593412 hasLocation W42435934121 @default.
- W4243593412 hasOpenAccess W4243593412 @default.
- W4243593412 hasPrimaryLocation W42435934121 @default.
- W4243593412 hasRelatedWork W12177930 @default.
- W4243593412 hasRelatedWork W12946729 @default.
- W4243593412 hasRelatedWork W17040153 @default.
- W4243593412 hasRelatedWork W23363863 @default.
- W4243593412 hasRelatedWork W31253314 @default.
- W4243593412 hasRelatedWork W3208185 @default.
- W4243593412 hasRelatedWork W3391782 @default.
- W4243593412 hasRelatedWork W41795743 @default.
- W4243593412 hasRelatedWork W51043571 @default.
- W4243593412 hasRelatedWork W35149996 @default.
- W4243593412 hasVolume "261" @default.
- W4243593412 isParatext "false" @default.
- W4243593412 isRetracted "false" @default.
- W4243593412 workType "article" @default.