Matches in SemOpenAlex for { <https://semopenalex.org/work/W4244458712> ?p ?o ?g. }
Showing items 1 to 52 of
52
with 100 items per page.
- W4244458712 endingPage "149" @default.
- W4244458712 startingPage "149" @default.
- W4244458712 created "2022-05-12" @default.
- W4244458712 date "1994-04-01" @default.
- W4244458712 modified "2023-10-14" @default.
- W4244458712 title "Double side polishing for VLSI of silicon wafer — one side mirror polishing considered with etched wafer roughness" @default.
- W4244458712 doi "https://doi.org/10.1016/0141-6359(94)90221-6" @default.
- W4244458712 hasPublicationYear "1994" @default.
- W4244458712 type Work @default.
- W4244458712 citedByCount "1" @default.
- W4244458712 countsByYear W42444587122015 @default.
- W4244458712 crossrefType "journal-article" @default.
- W4244458712 hasConcept C107365816 @default.
- W4244458712 hasConcept C120665830 @default.
- W4244458712 hasConcept C121332964 @default.
- W4244458712 hasConcept C138113353 @default.
- W4244458712 hasConcept C159985019 @default.
- W4244458712 hasConcept C160671074 @default.
- W4244458712 hasConcept C180088628 @default.
- W4244458712 hasConcept C192562407 @default.
- W4244458712 hasConcept C49040817 @default.
- W4244458712 hasConcept C544956773 @default.
- W4244458712 hasConcept C71039073 @default.
- W4244458712 hasConceptScore W4244458712C107365816 @default.
- W4244458712 hasConceptScore W4244458712C120665830 @default.
- W4244458712 hasConceptScore W4244458712C121332964 @default.
- W4244458712 hasConceptScore W4244458712C138113353 @default.
- W4244458712 hasConceptScore W4244458712C159985019 @default.
- W4244458712 hasConceptScore W4244458712C160671074 @default.
- W4244458712 hasConceptScore W4244458712C180088628 @default.
- W4244458712 hasConceptScore W4244458712C192562407 @default.
- W4244458712 hasConceptScore W4244458712C49040817 @default.
- W4244458712 hasConceptScore W4244458712C544956773 @default.
- W4244458712 hasConceptScore W4244458712C71039073 @default.
- W4244458712 hasIssue "2" @default.
- W4244458712 hasLocation W42444587121 @default.
- W4244458712 hasOpenAccess W4244458712 @default.
- W4244458712 hasPrimaryLocation W42444587121 @default.
- W4244458712 hasRelatedWork W13114209 @default.
- W4244458712 hasRelatedWork W13224424 @default.
- W4244458712 hasRelatedWork W1851452 @default.
- W4244458712 hasRelatedWork W19148187 @default.
- W4244458712 hasRelatedWork W2720477 @default.
- W4244458712 hasRelatedWork W36134243 @default.
- W4244458712 hasRelatedWork W40892031 @default.
- W4244458712 hasRelatedWork W4141922 @default.
- W4244458712 hasRelatedWork W44933242 @default.
- W4244458712 hasRelatedWork W54839772 @default.
- W4244458712 hasVolume "16" @default.
- W4244458712 isParatext "false" @default.
- W4244458712 isRetracted "false" @default.
- W4244458712 workType "article" @default.