Matches in SemOpenAlex for { <https://semopenalex.org/work/W4245186143> ?p ?o ?g. }
Showing items 1 to 33 of
33
with 100 items per page.
- W4245186143 created "2022-05-12" @default.
- W4245186143 date "2019-01-01" @default.
- W4245186143 modified "2023-09-25" @default.
- W4245186143 title "Monitoring of High Selectivity Chemistry for Si3N4 Etch" @default.
- W4245186143 doi "https://doi.org/10.1149/ma2019-02/13/892" @default.
- W4245186143 hasPublicationYear "2019" @default.
- W4245186143 type Work @default.
- W4245186143 citedByCount "0" @default.
- W4245186143 crossrefType "journal-article" @default.
- W4245186143 hasConcept C118792377 @default.
- W4245186143 hasConcept C161790260 @default.
- W4245186143 hasConcept C178790620 @default.
- W4245186143 hasConcept C185592680 @default.
- W4245186143 hasConceptScore W4245186143C118792377 @default.
- W4245186143 hasConceptScore W4245186143C161790260 @default.
- W4245186143 hasConceptScore W4245186143C178790620 @default.
- W4245186143 hasConceptScore W4245186143C185592680 @default.
- W4245186143 hasLocation W42451861431 @default.
- W4245186143 hasOpenAccess W4245186143 @default.
- W4245186143 hasPrimaryLocation W42451861431 @default.
- W4245186143 hasRelatedWork W2018826047 @default.
- W4245186143 hasRelatedWork W2055859081 @default.
- W4245186143 hasRelatedWork W2068543888 @default.
- W4245186143 hasRelatedWork W2319376959 @default.
- W4245186143 hasRelatedWork W2883510350 @default.
- W4245186143 hasRelatedWork W2951168231 @default.
- W4245186143 hasRelatedWork W3005235022 @default.
- W4245186143 hasRelatedWork W3005527239 @default.
- W4245186143 hasRelatedWork W4232502860 @default.
- W4245186143 hasRelatedWork W4237335210 @default.
- W4245186143 isParatext "false" @default.
- W4245186143 isRetracted "false" @default.
- W4245186143 workType "article" @default.