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- W4247515587 created "2022-05-12" @default.
- W4247515587 creator A5019739482 @default.
- W4247515587 creator A5022853409 @default.
- W4247515587 creator A5038524857 @default.
- W4247515587 creator A5091382215 @default.
- W4247515587 date "1998-01-01" @default.
- W4247515587 modified "2023-10-18" @default.
- W4247515587 title "Influence of process parameters on chemical-mechanical polishing of copper" @default.
- W4247515587 doi "https://doi.org/10.1109/mam.1998.887552" @default.
- W4247515587 hasPublicationYear "1998" @default.
- W4247515587 type Work @default.
- W4247515587 citedByCount "0" @default.
- W4247515587 crossrefType "proceedings-article" @default.
- W4247515587 hasAuthorship W4247515587A5019739482 @default.
- W4247515587 hasAuthorship W4247515587A5022853409 @default.
- W4247515587 hasAuthorship W4247515587A5038524857 @default.
- W4247515587 hasAuthorship W4247515587A5091382215 @default.
- W4247515587 hasConcept C111919701 @default.
- W4247515587 hasConcept C138113353 @default.
- W4247515587 hasConcept C180088628 @default.
- W4247515587 hasConcept C191897082 @default.
- W4247515587 hasConcept C192562407 @default.
- W4247515587 hasConcept C41008148 @default.
- W4247515587 hasConcept C544778455 @default.
- W4247515587 hasConcept C98045186 @default.
- W4247515587 hasConceptScore W4247515587C111919701 @default.
- W4247515587 hasConceptScore W4247515587C138113353 @default.
- W4247515587 hasConceptScore W4247515587C180088628 @default.
- W4247515587 hasConceptScore W4247515587C191897082 @default.
- W4247515587 hasConceptScore W4247515587C192562407 @default.
- W4247515587 hasConceptScore W4247515587C41008148 @default.
- W4247515587 hasConceptScore W4247515587C544778455 @default.
- W4247515587 hasConceptScore W4247515587C98045186 @default.
- W4247515587 hasLocation W42475155871 @default.
- W4247515587 hasOpenAccess W4247515587 @default.
- W4247515587 hasPrimaryLocation W42475155871 @default.
- W4247515587 hasRelatedWork W11004362 @default.
- W4247515587 hasRelatedWork W11444950 @default.
- W4247515587 hasRelatedWork W11776766 @default.
- W4247515587 hasRelatedWork W12578384 @default.
- W4247515587 hasRelatedWork W12984191 @default.
- W4247515587 hasRelatedWork W14111722 @default.
- W4247515587 hasRelatedWork W1511809 @default.
- W4247515587 hasRelatedWork W1525289 @default.
- W4247515587 hasRelatedWork W338479 @default.
- W4247515587 hasRelatedWork W5042774 @default.
- W4247515587 isParatext "false" @default.
- W4247515587 isRetracted "false" @default.
- W4247515587 workType "article" @default.