Matches in SemOpenAlex for { <https://semopenalex.org/work/W4248024490> ?p ?o ?g. }
Showing items 1 to 65 of
65
with 100 items per page.
- W4248024490 endingPage "182" @default.
- W4248024490 startingPage "179" @default.
- W4248024490 created "2022-05-12" @default.
- W4248024490 creator A5048666874 @default.
- W4248024490 creator A5052230338 @default.
- W4248024490 creator A5070063944 @default.
- W4248024490 creator A5071971459 @default.
- W4248024490 date "1996-01-01" @default.
- W4248024490 modified "2023-09-23" @default.
- W4248024490 title "Volatile products and endpoint detection in reactive ion etching of III–V compounds with a broad beam ECR source" @default.
- W4248024490 doi "https://doi.org/10.1016/b978-0-444-82334-2.50038-1" @default.
- W4248024490 hasPublicationYear "1996" @default.
- W4248024490 type Work @default.
- W4248024490 citedByCount "0" @default.
- W4248024490 crossrefType "book-chapter" @default.
- W4248024490 hasAuthorship W4248024490A5048666874 @default.
- W4248024490 hasAuthorship W4248024490A5052230338 @default.
- W4248024490 hasAuthorship W4248024490A5070063944 @default.
- W4248024490 hasAuthorship W4248024490A5071971459 @default.
- W4248024490 hasConcept C100460472 @default.
- W4248024490 hasConcept C107872376 @default.
- W4248024490 hasConcept C113196181 @default.
- W4248024490 hasConcept C120665830 @default.
- W4248024490 hasConcept C121332964 @default.
- W4248024490 hasConcept C130472188 @default.
- W4248024490 hasConcept C145148216 @default.
- W4248024490 hasConcept C168834538 @default.
- W4248024490 hasConcept C171250308 @default.
- W4248024490 hasConcept C178790620 @default.
- W4248024490 hasConcept C185592680 @default.
- W4248024490 hasConcept C188224857 @default.
- W4248024490 hasConcept C192562407 @default.
- W4248024490 hasConcept C2779227376 @default.
- W4248024490 hasConcept C50774322 @default.
- W4248024490 hasConceptScore W4248024490C100460472 @default.
- W4248024490 hasConceptScore W4248024490C107872376 @default.
- W4248024490 hasConceptScore W4248024490C113196181 @default.
- W4248024490 hasConceptScore W4248024490C120665830 @default.
- W4248024490 hasConceptScore W4248024490C121332964 @default.
- W4248024490 hasConceptScore W4248024490C130472188 @default.
- W4248024490 hasConceptScore W4248024490C145148216 @default.
- W4248024490 hasConceptScore W4248024490C168834538 @default.
- W4248024490 hasConceptScore W4248024490C171250308 @default.
- W4248024490 hasConceptScore W4248024490C178790620 @default.
- W4248024490 hasConceptScore W4248024490C185592680 @default.
- W4248024490 hasConceptScore W4248024490C188224857 @default.
- W4248024490 hasConceptScore W4248024490C192562407 @default.
- W4248024490 hasConceptScore W4248024490C2779227376 @default.
- W4248024490 hasConceptScore W4248024490C50774322 @default.
- W4248024490 hasLocation W42480244901 @default.
- W4248024490 hasOpenAccess W4248024490 @default.
- W4248024490 hasPrimaryLocation W42480244901 @default.
- W4248024490 hasRelatedWork W1964093103 @default.
- W4248024490 hasRelatedWork W1989399506 @default.
- W4248024490 hasRelatedWork W2000945766 @default.
- W4248024490 hasRelatedWork W2011400472 @default.
- W4248024490 hasRelatedWork W2011835277 @default.
- W4248024490 hasRelatedWork W2051292845 @default.
- W4248024490 hasRelatedWork W2051507316 @default.
- W4248024490 hasRelatedWork W2065060970 @default.
- W4248024490 hasRelatedWork W2083338112 @default.
- W4248024490 hasRelatedWork W3009667334 @default.
- W4248024490 isParatext "false" @default.
- W4248024490 isRetracted "false" @default.
- W4248024490 workType "book-chapter" @default.