Matches in SemOpenAlex for { <https://semopenalex.org/work/W4248779783> ?p ?o ?g. }
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with 100 items per page.
- W4248779783 endingPage "1" @default.
- W4248779783 startingPage "1" @default.
- W4248779783 created "2022-05-12" @default.
- W4248779783 creator A5002339439 @default.
- W4248779783 creator A5062661793 @default.
- W4248779783 creator A5073968910 @default.
- W4248779783 creator A5076046904 @default.
- W4248779783 creator A5082207112 @default.
- W4248779783 date "2019-02-27" @default.
- W4248779783 modified "2023-09-25" @default.
- W4248779783 title "Optimization of defect compensation for extreme ultraviolet lithography mask by covariance-matrix-adaption evolution strategy (Erratum)" @default.
- W4248779783 doi "https://doi.org/10.1117/1.jmm.18.1.019801" @default.
- W4248779783 hasPublicationYear "2019" @default.
- W4248779783 type Work @default.
- W4248779783 citedByCount "0" @default.
- W4248779783 crossrefType "journal-article" @default.
- W4248779783 hasAuthorship W4248779783A5002339439 @default.
- W4248779783 hasAuthorship W4248779783A5062661793 @default.
- W4248779783 hasAuthorship W4248779783A5073968910 @default.
- W4248779783 hasAuthorship W4248779783A5076046904 @default.
- W4248779783 hasAuthorship W4248779783A5082207112 @default.
- W4248779783 hasBestOaLocation W42487797831 @default.
- W4248779783 hasConcept C105795698 @default.
- W4248779783 hasConcept C106487976 @default.
- W4248779783 hasConcept C11171543 @default.
- W4248779783 hasConcept C11413529 @default.
- W4248779783 hasConcept C120665830 @default.
- W4248779783 hasConcept C121332964 @default.
- W4248779783 hasConcept C146024833 @default.
- W4248779783 hasConcept C15744967 @default.
- W4248779783 hasConcept C159985019 @default.
- W4248779783 hasConcept C162996421 @default.
- W4248779783 hasConcept C178650346 @default.
- W4248779783 hasConcept C185142706 @default.
- W4248779783 hasConcept C192562407 @default.
- W4248779783 hasConcept C2780023022 @default.
- W4248779783 hasConcept C33923547 @default.
- W4248779783 hasConcept C41008148 @default.
- W4248779783 hasConcept C49040817 @default.
- W4248779783 hasConcept C520434653 @default.
- W4248779783 hasConceptScore W4248779783C105795698 @default.
- W4248779783 hasConceptScore W4248779783C106487976 @default.
- W4248779783 hasConceptScore W4248779783C11171543 @default.
- W4248779783 hasConceptScore W4248779783C11413529 @default.
- W4248779783 hasConceptScore W4248779783C120665830 @default.
- W4248779783 hasConceptScore W4248779783C121332964 @default.
- W4248779783 hasConceptScore W4248779783C146024833 @default.
- W4248779783 hasConceptScore W4248779783C15744967 @default.
- W4248779783 hasConceptScore W4248779783C159985019 @default.
- W4248779783 hasConceptScore W4248779783C162996421 @default.
- W4248779783 hasConceptScore W4248779783C178650346 @default.
- W4248779783 hasConceptScore W4248779783C185142706 @default.
- W4248779783 hasConceptScore W4248779783C192562407 @default.
- W4248779783 hasConceptScore W4248779783C2780023022 @default.
- W4248779783 hasConceptScore W4248779783C33923547 @default.
- W4248779783 hasConceptScore W4248779783C41008148 @default.
- W4248779783 hasConceptScore W4248779783C49040817 @default.
- W4248779783 hasConceptScore W4248779783C520434653 @default.
- W4248779783 hasIssue "01" @default.
- W4248779783 hasLocation W42487797831 @default.
- W4248779783 hasOpenAccess W4248779783 @default.
- W4248779783 hasPrimaryLocation W42487797831 @default.
- W4248779783 hasRelatedWork W1967284391 @default.
- W4248779783 hasRelatedWork W1974774568 @default.
- W4248779783 hasRelatedWork W1988450805 @default.
- W4248779783 hasRelatedWork W2003889775 @default.
- W4248779783 hasRelatedWork W2016489720 @default.
- W4248779783 hasRelatedWork W2035418543 @default.
- W4248779783 hasRelatedWork W2077256885 @default.
- W4248779783 hasRelatedWork W2902018574 @default.
- W4248779783 hasRelatedWork W4233197176 @default.
- W4248779783 hasRelatedWork W4248779783 @default.
- W4248779783 hasVolume "18" @default.
- W4248779783 isParatext "false" @default.
- W4248779783 isRetracted "false" @default.
- W4248779783 workType "article" @default.