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- W4251105355 endingPage "1005" @default.
- W4251105355 startingPage "1005" @default.
- W4251105355 created "2022-05-12" @default.
- W4251105355 date "1984-01-01" @default.
- W4251105355 modified "2023-10-18" @default.
- W4251105355 title "Argon and reactive ion beam etching for SAW devices" @default.
- W4251105355 doi "https://doi.org/10.1016/0026-2714(84)90197-5" @default.
- W4251105355 hasPublicationYear "1984" @default.
- W4251105355 type Work @default.
- W4251105355 citedByCount "0" @default.
- W4251105355 crossrefType "journal-article" @default.
- W4251105355 hasConcept C100460472 @default.
- W4251105355 hasConcept C120665830 @default.
- W4251105355 hasConcept C121332964 @default.
- W4251105355 hasConcept C130472188 @default.
- W4251105355 hasConcept C145148216 @default.
- W4251105355 hasConcept C168834538 @default.
- W4251105355 hasConcept C171250308 @default.
- W4251105355 hasConcept C178790620 @default.
- W4251105355 hasConcept C184779094 @default.
- W4251105355 hasConcept C185592680 @default.
- W4251105355 hasConcept C192562407 @default.
- W4251105355 hasConcept C2779227376 @default.
- W4251105355 hasConcept C49040817 @default.
- W4251105355 hasConcept C50774322 @default.
- W4251105355 hasConcept C547737533 @default.
- W4251105355 hasConceptScore W4251105355C100460472 @default.
- W4251105355 hasConceptScore W4251105355C120665830 @default.
- W4251105355 hasConceptScore W4251105355C121332964 @default.
- W4251105355 hasConceptScore W4251105355C130472188 @default.
- W4251105355 hasConceptScore W4251105355C145148216 @default.
- W4251105355 hasConceptScore W4251105355C168834538 @default.
- W4251105355 hasConceptScore W4251105355C171250308 @default.
- W4251105355 hasConceptScore W4251105355C178790620 @default.
- W4251105355 hasConceptScore W4251105355C184779094 @default.
- W4251105355 hasConceptScore W4251105355C185592680 @default.
- W4251105355 hasConceptScore W4251105355C192562407 @default.
- W4251105355 hasConceptScore W4251105355C2779227376 @default.
- W4251105355 hasConceptScore W4251105355C49040817 @default.
- W4251105355 hasConceptScore W4251105355C50774322 @default.
- W4251105355 hasConceptScore W4251105355C547737533 @default.
- W4251105355 hasIssue "5" @default.
- W4251105355 hasLocation W42511053551 @default.
- W4251105355 hasOpenAccess W4251105355 @default.
- W4251105355 hasPrimaryLocation W42511053551 @default.
- W4251105355 hasRelatedWork W1968085529 @default.
- W4251105355 hasRelatedWork W1969972556 @default.
- W4251105355 hasRelatedWork W1997010164 @default.
- W4251105355 hasRelatedWork W2000945766 @default.
- W4251105355 hasRelatedWork W2011835277 @default.
- W4251105355 hasRelatedWork W2015166835 @default.
- W4251105355 hasRelatedWork W2027420890 @default.
- W4251105355 hasRelatedWork W2093286625 @default.
- W4251105355 hasRelatedWork W2547106720 @default.
- W4251105355 hasRelatedWork W2061854760 @default.
- W4251105355 hasVolume "24" @default.
- W4251105355 isParatext "false" @default.
- W4251105355 isRetracted "false" @default.
- W4251105355 workType "article" @default.