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- W4251314669 endingPage "823" @default.
- W4251314669 startingPage "823" @default.
- W4251314669 created "2022-05-12" @default.
- W4251314669 date "1984-01-01" @default.
- W4251314669 modified "2023-09-26" @default.
- W4251314669 title "Reactive-ion etching eases restrictions on materials and feature sizes" @default.
- W4251314669 doi "https://doi.org/10.1016/0026-2714(84)90412-8" @default.
- W4251314669 hasPublicationYear "1984" @default.
- W4251314669 type Work @default.
- W4251314669 citedByCount "0" @default.
- W4251314669 crossrefType "journal-article" @default.
- W4251314669 hasConcept C100460472 @default.
- W4251314669 hasConcept C130472188 @default.
- W4251314669 hasConcept C138885662 @default.
- W4251314669 hasConcept C145148216 @default.
- W4251314669 hasConcept C171250308 @default.
- W4251314669 hasConcept C178790620 @default.
- W4251314669 hasConcept C185592680 @default.
- W4251314669 hasConcept C192562407 @default.
- W4251314669 hasConcept C2776401178 @default.
- W4251314669 hasConcept C2779227376 @default.
- W4251314669 hasConcept C41008148 @default.
- W4251314669 hasConcept C41895202 @default.
- W4251314669 hasConceptScore W4251314669C100460472 @default.
- W4251314669 hasConceptScore W4251314669C130472188 @default.
- W4251314669 hasConceptScore W4251314669C138885662 @default.
- W4251314669 hasConceptScore W4251314669C145148216 @default.
- W4251314669 hasConceptScore W4251314669C171250308 @default.
- W4251314669 hasConceptScore W4251314669C178790620 @default.
- W4251314669 hasConceptScore W4251314669C185592680 @default.
- W4251314669 hasConceptScore W4251314669C192562407 @default.
- W4251314669 hasConceptScore W4251314669C2776401178 @default.
- W4251314669 hasConceptScore W4251314669C2779227376 @default.
- W4251314669 hasConceptScore W4251314669C41008148 @default.
- W4251314669 hasConceptScore W4251314669C41895202 @default.
- W4251314669 hasIssue "4" @default.
- W4251314669 hasLocation W42513146691 @default.
- W4251314669 hasOpenAccess W4251314669 @default.
- W4251314669 hasPrimaryLocation W42513146691 @default.
- W4251314669 hasRelatedWork W1964093103 @default.
- W4251314669 hasRelatedWork W1982544302 @default.
- W4251314669 hasRelatedWork W2011835277 @default.
- W4251314669 hasRelatedWork W2041001518 @default.
- W4251314669 hasRelatedWork W2050537665 @default.
- W4251314669 hasRelatedWork W2140288194 @default.
- W4251314669 hasRelatedWork W2239343226 @default.
- W4251314669 hasRelatedWork W2322197603 @default.
- W4251314669 hasRelatedWork W2923172560 @default.
- W4251314669 hasRelatedWork W4361282727 @default.
- W4251314669 hasVolume "24" @default.
- W4251314669 isParatext "false" @default.
- W4251314669 isRetracted "false" @default.
- W4251314669 workType "article" @default.