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- W4252025217 created "2022-05-12" @default.
- W4252025217 date "2005-01-01" @default.
- W4252025217 modified "2023-09-25" @default.
- W4252025217 title "Influence of Ta(N) Metal Gate Microstructure on Its Etch Properties" @default.
- W4252025217 doi "https://doi.org/10.1149/ma2005-02/13/563" @default.
- W4252025217 hasPublicationYear "2005" @default.
- W4252025217 type Work @default.
- W4252025217 citedByCount "0" @default.
- W4252025217 crossrefType "journal-article" @default.
- W4252025217 hasBestOaLocation W42520252171 @default.
- W4252025217 hasConcept C191897082 @default.
- W4252025217 hasConcept C192562407 @default.
- W4252025217 hasConcept C544153396 @default.
- W4252025217 hasConcept C87976508 @default.
- W4252025217 hasConceptScore W4252025217C191897082 @default.
- W4252025217 hasConceptScore W4252025217C192562407 @default.
- W4252025217 hasConceptScore W4252025217C544153396 @default.
- W4252025217 hasConceptScore W4252025217C87976508 @default.
- W4252025217 hasLocation W42520252171 @default.
- W4252025217 hasOpenAccess W4252025217 @default.
- W4252025217 hasPrimaryLocation W42520252171 @default.
- W4252025217 hasRelatedWork W2006022085 @default.
- W4252025217 hasRelatedWork W2058945371 @default.
- W4252025217 hasRelatedWork W2357858530 @default.
- W4252025217 hasRelatedWork W2389482125 @default.
- W4252025217 hasRelatedWork W2765099756 @default.
- W4252025217 hasRelatedWork W290886756 @default.
- W4252025217 hasRelatedWork W2937989229 @default.
- W4252025217 hasRelatedWork W2958260365 @default.
- W4252025217 hasRelatedWork W3134450183 @default.
- W4252025217 hasRelatedWork W4281769293 @default.
- W4252025217 isParatext "false" @default.
- W4252025217 isRetracted "false" @default.
- W4252025217 workType "article" @default.