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- W4253876067 endingPage "91" @default.
- W4253876067 startingPage "91" @default.
- W4253876067 created "2022-05-12" @default.
- W4253876067 date "1996-03-01" @default.
- W4253876067 modified "2023-10-18" @default.
- W4253876067 title "Thin film deposition system" @default.
- W4253876067 doi "https://doi.org/10.1016/s0026-0576(96)95737-2" @default.
- W4253876067 hasPublicationYear "1996" @default.
- W4253876067 type Work @default.
- W4253876067 citedByCount "0" @default.
- W4253876067 crossrefType "journal-article" @default.
- W4253876067 hasConcept C127313418 @default.
- W4253876067 hasConcept C151730666 @default.
- W4253876067 hasConcept C171250308 @default.
- W4253876067 hasConcept C19067145 @default.
- W4253876067 hasConcept C192562407 @default.
- W4253876067 hasConcept C2816523 @default.
- W4253876067 hasConcept C64297162 @default.
- W4253876067 hasConceptScore W4253876067C127313418 @default.
- W4253876067 hasConceptScore W4253876067C151730666 @default.
- W4253876067 hasConceptScore W4253876067C171250308 @default.
- W4253876067 hasConceptScore W4253876067C19067145 @default.
- W4253876067 hasConceptScore W4253876067C192562407 @default.
- W4253876067 hasConceptScore W4253876067C2816523 @default.
- W4253876067 hasConceptScore W4253876067C64297162 @default.
- W4253876067 hasIssue "3" @default.
- W4253876067 hasLocation W42538760671 @default.
- W4253876067 hasOpenAccess W4253876067 @default.
- W4253876067 hasPrimaryLocation W42538760671 @default.
- W4253876067 hasRelatedWork W10469513 @default.
- W4253876067 hasRelatedWork W1468905 @default.
- W4253876067 hasRelatedWork W23645192 @default.
- W4253876067 hasRelatedWork W24959061 @default.
- W4253876067 hasRelatedWork W27957971 @default.
- W4253876067 hasRelatedWork W31503462 @default.
- W4253876067 hasRelatedWork W35087920 @default.
- W4253876067 hasRelatedWork W35263535 @default.
- W4253876067 hasRelatedWork W55199854 @default.
- W4253876067 hasRelatedWork W8892326 @default.
- W4253876067 hasVolume "94" @default.
- W4253876067 isParatext "false" @default.
- W4253876067 isRetracted "false" @default.
- W4253876067 workType "article" @default.