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- W4254451310 created "2022-05-12" @default.
- W4254451310 creator A5020926439 @default.
- W4254451310 creator A5030911755 @default.
- W4254451310 creator A5033102904 @default.
- W4254451310 creator A5049528140 @default.
- W4254451310 creator A5051780556 @default.
- W4254451310 creator A5074942095 @default.
- W4254451310 date "1997-01-01" @default.
- W4254451310 modified "2023-09-27" @default.
- W4254451310 title "Surface Treatment with UV-Excited Radicals for Highly-Reliable Gate Dielectrics" @default.
- W4254451310 cites W1973109573 @default.
- W4254451310 cites W1988375521 @default.
- W4254451310 cites W2139166801 @default.
- W4254451310 doi "https://doi.org/10.1557/proc-473-131" @default.
- W4254451310 hasPublicationYear "1997" @default.
- W4254451310 type Work @default.
- W4254451310 citedByCount "0" @default.
- W4254451310 crossrefType "journal-article" @default.
- W4254451310 hasAuthorship W4254451310A5020926439 @default.
- W4254451310 hasAuthorship W4254451310A5030911755 @default.
- W4254451310 hasAuthorship W4254451310A5033102904 @default.
- W4254451310 hasAuthorship W4254451310A5049528140 @default.
- W4254451310 hasAuthorship W4254451310A5051780556 @default.
- W4254451310 hasAuthorship W4254451310A5074942095 @default.
- W4254451310 hasConcept C100460472 @default.
- W4254451310 hasConcept C111368507 @default.
- W4254451310 hasConcept C119599485 @default.
- W4254451310 hasConcept C121332964 @default.
- W4254451310 hasConcept C125099081 @default.
- W4254451310 hasConcept C127313418 @default.
- W4254451310 hasConcept C127413603 @default.
- W4254451310 hasConcept C133386390 @default.
- W4254451310 hasConcept C139066938 @default.
- W4254451310 hasConcept C165801399 @default.
- W4254451310 hasConcept C166972891 @default.
- W4254451310 hasConcept C171250308 @default.
- W4254451310 hasConcept C172385210 @default.
- W4254451310 hasConcept C178790620 @default.
- W4254451310 hasConcept C181500209 @default.
- W4254451310 hasConcept C185544564 @default.
- W4254451310 hasConcept C185592680 @default.
- W4254451310 hasConcept C191897082 @default.
- W4254451310 hasConcept C192562407 @default.
- W4254451310 hasConcept C2777289219 @default.
- W4254451310 hasConcept C2779227376 @default.
- W4254451310 hasConcept C49040817 @default.
- W4254451310 hasConcept C505241676 @default.
- W4254451310 hasConcept C544153396 @default.
- W4254451310 hasConcept C544956773 @default.
- W4254451310 hasConcept C75473681 @default.
- W4254451310 hasConceptScore W4254451310C100460472 @default.
- W4254451310 hasConceptScore W4254451310C111368507 @default.
- W4254451310 hasConceptScore W4254451310C119599485 @default.
- W4254451310 hasConceptScore W4254451310C121332964 @default.
- W4254451310 hasConceptScore W4254451310C125099081 @default.
- W4254451310 hasConceptScore W4254451310C127313418 @default.
- W4254451310 hasConceptScore W4254451310C127413603 @default.
- W4254451310 hasConceptScore W4254451310C133386390 @default.
- W4254451310 hasConceptScore W4254451310C139066938 @default.
- W4254451310 hasConceptScore W4254451310C165801399 @default.
- W4254451310 hasConceptScore W4254451310C166972891 @default.
- W4254451310 hasConceptScore W4254451310C171250308 @default.
- W4254451310 hasConceptScore W4254451310C172385210 @default.
- W4254451310 hasConceptScore W4254451310C178790620 @default.
- W4254451310 hasConceptScore W4254451310C181500209 @default.
- W4254451310 hasConceptScore W4254451310C185544564 @default.
- W4254451310 hasConceptScore W4254451310C185592680 @default.
- W4254451310 hasConceptScore W4254451310C191897082 @default.
- W4254451310 hasConceptScore W4254451310C192562407 @default.
- W4254451310 hasConceptScore W4254451310C2777289219 @default.
- W4254451310 hasConceptScore W4254451310C2779227376 @default.
- W4254451310 hasConceptScore W4254451310C49040817 @default.
- W4254451310 hasConceptScore W4254451310C505241676 @default.
- W4254451310 hasConceptScore W4254451310C544153396 @default.
- W4254451310 hasConceptScore W4254451310C544956773 @default.
- W4254451310 hasConceptScore W4254451310C75473681 @default.
- W4254451310 hasLocation W42544513101 @default.
- W4254451310 hasOpenAccess W4254451310 @default.
- W4254451310 hasPrimaryLocation W42544513101 @default.
- W4254451310 hasRelatedWork W2013557620 @default.
- W4254451310 hasRelatedWork W2029845838 @default.
- W4254451310 hasRelatedWork W2056840039 @default.
- W4254451310 hasRelatedWork W2062335077 @default.
- W4254451310 hasRelatedWork W2070937509 @default.
- W4254451310 hasRelatedWork W2091210967 @default.
- W4254451310 hasRelatedWork W2294048369 @default.
- W4254451310 hasRelatedWork W2902562904 @default.
- W4254451310 hasRelatedWork W2952162480 @default.
- W4254451310 hasRelatedWork W3160436526 @default.
- W4254451310 hasVolume "473" @default.
- W4254451310 isParatext "false" @default.
- W4254451310 isRetracted "false" @default.
- W4254451310 workType "article" @default.