Matches in SemOpenAlex for { <https://semopenalex.org/work/W4256256442> ?p ?o ?g. }
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- W4256256442 endingPage "178" @default.
- W4256256442 startingPage "178" @default.
- W4256256442 created "2022-05-12" @default.
- W4256256442 date "1984-01-01" @default.
- W4256256442 modified "2023-10-14" @default.
- W4256256442 title "Important considerations in selecting anisotropic plasma etching equipment" @default.
- W4256256442 doi "https://doi.org/10.1016/0026-2714(84)90727-3" @default.
- W4256256442 hasPublicationYear "1984" @default.
- W4256256442 type Work @default.
- W4256256442 citedByCount "0" @default.
- W4256256442 crossrefType "journal-article" @default.
- W4256256442 hasConcept C100460472 @default.
- W4256256442 hasConcept C107187091 @default.
- W4256256442 hasConcept C121332964 @default.
- W4256256442 hasConcept C171250308 @default.
- W4256256442 hasConcept C185544564 @default.
- W4256256442 hasConcept C192562407 @default.
- W4256256442 hasConcept C2779227376 @default.
- W4256256442 hasConcept C41008148 @default.
- W4256256442 hasConcept C82706917 @default.
- W4256256442 hasConceptScore W4256256442C100460472 @default.
- W4256256442 hasConceptScore W4256256442C107187091 @default.
- W4256256442 hasConceptScore W4256256442C121332964 @default.
- W4256256442 hasConceptScore W4256256442C171250308 @default.
- W4256256442 hasConceptScore W4256256442C185544564 @default.
- W4256256442 hasConceptScore W4256256442C192562407 @default.
- W4256256442 hasConceptScore W4256256442C2779227376 @default.
- W4256256442 hasConceptScore W4256256442C41008148 @default.
- W4256256442 hasConceptScore W4256256442C82706917 @default.
- W4256256442 hasIssue "1" @default.
- W4256256442 hasLocation W42562564421 @default.
- W4256256442 hasOpenAccess W4256256442 @default.
- W4256256442 hasPrimaryLocation W42562564421 @default.
- W4256256442 hasRelatedWork W2022006181 @default.
- W4256256442 hasRelatedWork W2059112004 @default.
- W4256256442 hasRelatedWork W2119343688 @default.
- W4256256442 hasRelatedWork W2139606557 @default.
- W4256256442 hasRelatedWork W2155099757 @default.
- W4256256442 hasRelatedWork W2366161362 @default.
- W4256256442 hasRelatedWork W2385387985 @default.
- W4256256442 hasRelatedWork W3197419717 @default.
- W4256256442 hasRelatedWork W4206857777 @default.
- W4256256442 hasRelatedWork W820049253 @default.
- W4256256442 hasVolume "24" @default.
- W4256256442 isParatext "false" @default.
- W4256256442 isRetracted "false" @default.
- W4256256442 workType "article" @default.