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- W4281677142 endingPage "148" @default.
- W4281677142 startingPage "144" @default.
- W4281677142 created "2022-06-13" @default.
- W4281677142 creator A5032900762 @default.
- W4281677142 date "2022-06-01" @default.
- W4281677142 modified "2023-10-16" @default.
- W4281677142 title "Effect of Discharge Power in a Plasma during Reactive-Ion Etching of Massive Substrates on the Matching of the Lower Electrode with a High-Frequency Bias Generator" @default.
- W4281677142 cites W1995430272 @default.
- W4281677142 cites W2018011943 @default.
- W4281677142 cites W2088571013 @default.
- W4281677142 cites W3104300195 @default.
- W4281677142 cites W3186824842 @default.
- W4281677142 cites W3196091311 @default.
- W4281677142 doi "https://doi.org/10.1134/s1063739722030106" @default.
- W4281677142 hasPublicationYear "2022" @default.
- W4281677142 type Work @default.
- W4281677142 citedByCount "0" @default.
- W4281677142 crossrefType "journal-article" @default.
- W4281677142 hasAuthorship W4281677142A5032900762 @default.
- W4281677142 hasConcept C100460472 @default.
- W4281677142 hasConcept C113196181 @default.
- W4281677142 hasConcept C119599485 @default.
- W4281677142 hasConcept C120665830 @default.
- W4281677142 hasConcept C121332964 @default.
- W4281677142 hasConcept C127413603 @default.
- W4281677142 hasConcept C130472188 @default.
- W4281677142 hasConcept C145148216 @default.
- W4281677142 hasConcept C147789679 @default.
- W4281677142 hasConcept C159985019 @default.
- W4281677142 hasConcept C163258240 @default.
- W4281677142 hasConcept C17525397 @default.
- W4281677142 hasConcept C178790620 @default.
- W4281677142 hasConcept C184779094 @default.
- W4281677142 hasConcept C185592680 @default.
- W4281677142 hasConcept C192562407 @default.
- W4281677142 hasConcept C199360897 @default.
- W4281677142 hasConcept C2779227376 @default.
- W4281677142 hasConcept C2780992000 @default.
- W4281677142 hasConcept C30254895 @default.
- W4281677142 hasConcept C41008148 @default.
- W4281677142 hasConcept C41700454 @default.
- W4281677142 hasConcept C43617362 @default.
- W4281677142 hasConcept C49040817 @default.
- W4281677142 hasConcept C547737533 @default.
- W4281677142 hasConcept C62520636 @default.
- W4281677142 hasConcept C65682993 @default.
- W4281677142 hasConcept C82706917 @default.
- W4281677142 hasConceptScore W4281677142C100460472 @default.
- W4281677142 hasConceptScore W4281677142C113196181 @default.
- W4281677142 hasConceptScore W4281677142C119599485 @default.
- W4281677142 hasConceptScore W4281677142C120665830 @default.
- W4281677142 hasConceptScore W4281677142C121332964 @default.
- W4281677142 hasConceptScore W4281677142C127413603 @default.
- W4281677142 hasConceptScore W4281677142C130472188 @default.
- W4281677142 hasConceptScore W4281677142C145148216 @default.
- W4281677142 hasConceptScore W4281677142C147789679 @default.
- W4281677142 hasConceptScore W4281677142C159985019 @default.
- W4281677142 hasConceptScore W4281677142C163258240 @default.
- W4281677142 hasConceptScore W4281677142C17525397 @default.
- W4281677142 hasConceptScore W4281677142C178790620 @default.
- W4281677142 hasConceptScore W4281677142C184779094 @default.
- W4281677142 hasConceptScore W4281677142C185592680 @default.
- W4281677142 hasConceptScore W4281677142C192562407 @default.
- W4281677142 hasConceptScore W4281677142C199360897 @default.
- W4281677142 hasConceptScore W4281677142C2779227376 @default.
- W4281677142 hasConceptScore W4281677142C2780992000 @default.
- W4281677142 hasConceptScore W4281677142C30254895 @default.
- W4281677142 hasConceptScore W4281677142C41008148 @default.
- W4281677142 hasConceptScore W4281677142C41700454 @default.
- W4281677142 hasConceptScore W4281677142C43617362 @default.
- W4281677142 hasConceptScore W4281677142C49040817 @default.
- W4281677142 hasConceptScore W4281677142C547737533 @default.
- W4281677142 hasConceptScore W4281677142C62520636 @default.
- W4281677142 hasConceptScore W4281677142C65682993 @default.
- W4281677142 hasConceptScore W4281677142C82706917 @default.
- W4281677142 hasIssue "3" @default.
- W4281677142 hasLocation W42816771421 @default.
- W4281677142 hasOpenAccess W4281677142 @default.
- W4281677142 hasPrimaryLocation W42816771421 @default.
- W4281677142 hasRelatedWork W1993719923 @default.
- W4281677142 hasRelatedWork W2011835277 @default.
- W4281677142 hasRelatedWork W2050644211 @default.
- W4281677142 hasRelatedWork W2087201154 @default.
- W4281677142 hasRelatedWork W2136084562 @default.
- W4281677142 hasRelatedWork W2333385042 @default.
- W4281677142 hasRelatedWork W2340333645 @default.
- W4281677142 hasRelatedWork W4231952814 @default.
- W4281677142 hasRelatedWork W4362663149 @default.
- W4281677142 hasRelatedWork W2083108293 @default.
- W4281677142 hasVolume "51" @default.
- W4281677142 isParatext "false" @default.
- W4281677142 isRetracted "false" @default.
- W4281677142 workType "article" @default.