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- W4285281055 created "2022-07-14" @default.
- W4285281055 creator A5005572481 @default.
- W4285281055 creator A5032212490 @default.
- W4285281055 creator A5047933135 @default.
- W4285281055 creator A5050965642 @default.
- W4285281055 creator A5076618796 @default.
- W4285281055 date "2022-01-01" @default.
- W4285281055 modified "2023-10-05" @default.
- W4285281055 title "Optical Properties of Extreme Ultraviolet Mask for Enhanced Imaging Performance" @default.
- W4285281055 cites W1964412096 @default.
- W4285281055 cites W2011730711 @default.
- W4285281055 cites W2293658215 @default.
- W4285281055 cites W2613306844 @default.
- W4285281055 cites W2795065817 @default.
- W4285281055 cites W2921221953 @default.
- W4285281055 cites W2922506810 @default.
- W4285281055 cites W2971355675 @default.
- W4285281055 cites W2998801531 @default.
- W4285281055 cites W3022679605 @default.
- W4285281055 cites W3091401086 @default.
- W4285281055 cites W3171834143 @default.
- W4285281055 doi "https://doi.org/10.2139/ssrn.4103184" @default.
- W4285281055 hasPublicationYear "2022" @default.
- W4285281055 type Work @default.
- W4285281055 citedByCount "0" @default.
- W4285281055 crossrefType "journal-article" @default.
- W4285281055 hasAuthorship W4285281055A5005572481 @default.
- W4285281055 hasAuthorship W4285281055A5032212490 @default.
- W4285281055 hasAuthorship W4285281055A5047933135 @default.
- W4285281055 hasAuthorship W4285281055A5050965642 @default.
- W4285281055 hasAuthorship W4285281055A5076618796 @default.
- W4285281055 hasConcept C120665830 @default.
- W4285281055 hasConcept C121332964 @default.
- W4285281055 hasConcept C146024833 @default.
- W4285281055 hasConcept C16005928 @default.
- W4285281055 hasConcept C192562407 @default.
- W4285281055 hasConcept C2776798109 @default.
- W4285281055 hasConcept C3017420807 @default.
- W4285281055 hasConcept C49040817 @default.
- W4285281055 hasConcept C520434653 @default.
- W4285281055 hasConcept C71924100 @default.
- W4285281055 hasConceptScore W4285281055C120665830 @default.
- W4285281055 hasConceptScore W4285281055C121332964 @default.
- W4285281055 hasConceptScore W4285281055C146024833 @default.
- W4285281055 hasConceptScore W4285281055C16005928 @default.
- W4285281055 hasConceptScore W4285281055C192562407 @default.
- W4285281055 hasConceptScore W4285281055C2776798109 @default.
- W4285281055 hasConceptScore W4285281055C3017420807 @default.
- W4285281055 hasConceptScore W4285281055C49040817 @default.
- W4285281055 hasConceptScore W4285281055C520434653 @default.
- W4285281055 hasConceptScore W4285281055C71924100 @default.
- W4285281055 hasLocation W42852810551 @default.
- W4285281055 hasOpenAccess W4285281055 @default.
- W4285281055 hasPrimaryLocation W42852810551 @default.
- W4285281055 hasRelatedWork W1599562243 @default.
- W4285281055 hasRelatedWork W1977908266 @default.
- W4285281055 hasRelatedWork W1984731540 @default.
- W4285281055 hasRelatedWork W1988129333 @default.
- W4285281055 hasRelatedWork W2039647797 @default.
- W4285281055 hasRelatedWork W2080974897 @default.
- W4285281055 hasRelatedWork W2370020143 @default.
- W4285281055 hasRelatedWork W2381226462 @default.
- W4285281055 hasRelatedWork W2385013330 @default.
- W4285281055 hasRelatedWork W3194992200 @default.
- W4285281055 isParatext "false" @default.
- W4285281055 isRetracted "false" @default.
- W4285281055 workType "article" @default.