Matches in SemOpenAlex for { <https://semopenalex.org/work/W4293273278> ?p ?o ?g. }
Showing items 1 to 53 of
53
with 100 items per page.
- W4293273278 created "2022-08-27" @default.
- W4293273278 creator A5010586738 @default.
- W4293273278 creator A5052639910 @default.
- W4293273278 date "2014-07-15" @default.
- W4293273278 modified "2023-10-12" @default.
- W4293273278 title "Deposition of semiconductive films in SF6 ion-ion plasma" @default.
- W4293273278 hasPublicationYear "2014" @default.
- W4293273278 type Work @default.
- W4293273278 citedByCount "0" @default.
- W4293273278 crossrefType "proceedings-article" @default.
- W4293273278 hasAuthorship W4293273278A5010586738 @default.
- W4293273278 hasAuthorship W4293273278A5052639910 @default.
- W4293273278 hasConcept C121332964 @default.
- W4293273278 hasConcept C127313418 @default.
- W4293273278 hasConcept C145148216 @default.
- W4293273278 hasConcept C151730666 @default.
- W4293273278 hasConcept C178790620 @default.
- W4293273278 hasConcept C185544564 @default.
- W4293273278 hasConcept C185592680 @default.
- W4293273278 hasConcept C192562407 @default.
- W4293273278 hasConcept C2816523 @default.
- W4293273278 hasConcept C49040817 @default.
- W4293273278 hasConcept C64297162 @default.
- W4293273278 hasConcept C82706917 @default.
- W4293273278 hasConceptScore W4293273278C121332964 @default.
- W4293273278 hasConceptScore W4293273278C127313418 @default.
- W4293273278 hasConceptScore W4293273278C145148216 @default.
- W4293273278 hasConceptScore W4293273278C151730666 @default.
- W4293273278 hasConceptScore W4293273278C178790620 @default.
- W4293273278 hasConceptScore W4293273278C185544564 @default.
- W4293273278 hasConceptScore W4293273278C185592680 @default.
- W4293273278 hasConceptScore W4293273278C192562407 @default.
- W4293273278 hasConceptScore W4293273278C2816523 @default.
- W4293273278 hasConceptScore W4293273278C49040817 @default.
- W4293273278 hasConceptScore W4293273278C64297162 @default.
- W4293273278 hasConceptScore W4293273278C82706917 @default.
- W4293273278 hasLocation W42932732781 @default.
- W4293273278 hasLocation W42932732782 @default.
- W4293273278 hasOpenAccess W4293273278 @default.
- W4293273278 hasPrimaryLocation W42932732781 @default.
- W4293273278 hasRelatedWork W2018879842 @default.
- W4293273278 hasRelatedWork W2737498735 @default.
- W4293273278 hasRelatedWork W2744391499 @default.
- W4293273278 hasRelatedWork W2898370298 @default.
- W4293273278 hasRelatedWork W2899084033 @default.
- W4293273278 hasRelatedWork W3041790586 @default.
- W4293273278 hasRelatedWork W3120461830 @default.
- W4293273278 hasRelatedWork W3144504424 @default.
- W4293273278 hasRelatedWork W4230250635 @default.
- W4293273278 hasRelatedWork W4292492973 @default.
- W4293273278 isParatext "false" @default.
- W4293273278 isRetracted "false" @default.
- W4293273278 workType "article" @default.