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Matches in SemOpenAlex for { <https://semopenalex.org/work/W4293315122> ?p ?o ?g. }

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• W4293315122 date "2022-08-27" @default.
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• W4293315122 title "Tunable sensitivity of zirconium oxynitride thin-film temperature sensor modulated by film thickness" @default.
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• W4293315122 doi "https://doi.org/10.1007/s10854-022-08900-8" @default.
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