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- W4297201764 created "2022-09-27" @default.
- W4297201764 creator A5008871397 @default.
- W4297201764 creator A5038390940 @default.
- W4297201764 creator A5039323702 @default.
- W4297201764 creator A5065519612 @default.
- W4297201764 creator A5087148837 @default.
- W4297201764 creator A5091327499 @default.
- W4297201764 date "2009-01-01" @default.
- W4297201764 modified "2023-10-17" @default.
- W4297201764 title "Discriminating the impact of UV, ions and radicals on the linewidth roughness of 193 nm resist patterns exposed to reactive plasmas" @default.
- W4297201764 hasPublicationYear "2009" @default.
- W4297201764 type Work @default.
- W4297201764 citedByCount "0" @default.
- W4297201764 crossrefType "proceedings-article" @default.
- W4297201764 hasAuthorship W4297201764A5008871397 @default.
- W4297201764 hasAuthorship W4297201764A5038390940 @default.
- W4297201764 hasAuthorship W4297201764A5039323702 @default.
- W4297201764 hasAuthorship W4297201764A5065519612 @default.
- W4297201764 hasAuthorship W4297201764A5087148837 @default.
- W4297201764 hasAuthorship W4297201764A5091327499 @default.
- W4297201764 hasConcept C120665830 @default.
- W4297201764 hasConcept C121332964 @default.
- W4297201764 hasConcept C139066938 @default.
- W4297201764 hasConcept C142181693 @default.
- W4297201764 hasConcept C145148216 @default.
- W4297201764 hasConcept C171250308 @default.
- W4297201764 hasConcept C178790620 @default.
- W4297201764 hasConcept C185544564 @default.
- W4297201764 hasConcept C185592680 @default.
- W4297201764 hasConcept C192562407 @default.
- W4297201764 hasConcept C2779227376 @default.
- W4297201764 hasConcept C49040817 @default.
- W4297201764 hasConcept C520434653 @default.
- W4297201764 hasConcept C53524968 @default.
- W4297201764 hasConcept C75473681 @default.
- W4297201764 hasConcept C82706917 @default.
- W4297201764 hasConceptScore W4297201764C120665830 @default.
- W4297201764 hasConceptScore W4297201764C121332964 @default.
- W4297201764 hasConceptScore W4297201764C139066938 @default.
- W4297201764 hasConceptScore W4297201764C142181693 @default.
- W4297201764 hasConceptScore W4297201764C145148216 @default.
- W4297201764 hasConceptScore W4297201764C171250308 @default.
- W4297201764 hasConceptScore W4297201764C178790620 @default.
- W4297201764 hasConceptScore W4297201764C185544564 @default.
- W4297201764 hasConceptScore W4297201764C185592680 @default.
- W4297201764 hasConceptScore W4297201764C192562407 @default.
- W4297201764 hasConceptScore W4297201764C2779227376 @default.
- W4297201764 hasConceptScore W4297201764C49040817 @default.
- W4297201764 hasConceptScore W4297201764C520434653 @default.
- W4297201764 hasConceptScore W4297201764C53524968 @default.
- W4297201764 hasConceptScore W4297201764C75473681 @default.
- W4297201764 hasConceptScore W4297201764C82706917 @default.
- W4297201764 hasLocation W42972017641 @default.
- W4297201764 hasLocation W42972017642 @default.
- W4297201764 hasOpenAccess W4297201764 @default.
- W4297201764 hasPrimaryLocation W42972017641 @default.
- W4297201764 hasRelatedWork W1971082942 @default.
- W4297201764 hasRelatedWork W1985976503 @default.
- W4297201764 hasRelatedWork W2026306349 @default.
- W4297201764 hasRelatedWork W2040441053 @default.
- W4297201764 hasRelatedWork W2053190549 @default.
- W4297201764 hasRelatedWork W2062650133 @default.
- W4297201764 hasRelatedWork W2071299606 @default.
- W4297201764 hasRelatedWork W2072560641 @default.
- W4297201764 hasRelatedWork W2079326773 @default.
- W4297201764 hasRelatedWork W2087150921 @default.
- W4297201764 isParatext "false" @default.
- W4297201764 isRetracted "false" @default.
- W4297201764 workType "article" @default.