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- W4297445027 created "2022-09-28" @default.
- W4297445027 creator A5002186061 @default.
- W4297445027 creator A5015933423 @default.
- W4297445027 creator A5021980562 @default.
- W4297445027 creator A5031202275 @default.
- W4297445027 creator A5063084716 @default.
- W4297445027 creator A5091742972 @default.
- W4297445027 date "2012-09-20" @default.
- W4297445027 modified "2023-09-24" @default.
- W4297445027 title "Enhanced model calibration for e-beam lithography: from pattern selection to parameter optimization" @default.
- W4297445027 hasPublicationYear "2012" @default.
- W4297445027 type Work @default.
- W4297445027 citedByCount "0" @default.
- W4297445027 crossrefType "proceedings-article" @default.
- W4297445027 hasAuthorship W4297445027A5002186061 @default.
- W4297445027 hasAuthorship W4297445027A5015933423 @default.
- W4297445027 hasAuthorship W4297445027A5021980562 @default.
- W4297445027 hasAuthorship W4297445027A5031202275 @default.
- W4297445027 hasAuthorship W4297445027A5063084716 @default.
- W4297445027 hasAuthorship W4297445027A5091742972 @default.
- W4297445027 hasConcept C105487726 @default.
- W4297445027 hasConcept C120665830 @default.
- W4297445027 hasConcept C121332964 @default.
- W4297445027 hasConcept C127413603 @default.
- W4297445027 hasConcept C154945302 @default.
- W4297445027 hasConcept C165838908 @default.
- W4297445027 hasConcept C168834538 @default.
- W4297445027 hasConcept C171250308 @default.
- W4297445027 hasConcept C186060115 @default.
- W4297445027 hasConcept C192562407 @default.
- W4297445027 hasConcept C200274948 @default.
- W4297445027 hasConcept C204223013 @default.
- W4297445027 hasConcept C24326235 @default.
- W4297445027 hasConcept C2779227376 @default.
- W4297445027 hasConcept C41008148 @default.
- W4297445027 hasConcept C49040817 @default.
- W4297445027 hasConcept C53524968 @default.
- W4297445027 hasConcept C62520636 @default.
- W4297445027 hasConcept C81917197 @default.
- W4297445027 hasConcept C86803240 @default.
- W4297445027 hasConceptScore W4297445027C105487726 @default.
- W4297445027 hasConceptScore W4297445027C120665830 @default.
- W4297445027 hasConceptScore W4297445027C121332964 @default.
- W4297445027 hasConceptScore W4297445027C127413603 @default.
- W4297445027 hasConceptScore W4297445027C154945302 @default.
- W4297445027 hasConceptScore W4297445027C165838908 @default.
- W4297445027 hasConceptScore W4297445027C168834538 @default.
- W4297445027 hasConceptScore W4297445027C171250308 @default.
- W4297445027 hasConceptScore W4297445027C186060115 @default.
- W4297445027 hasConceptScore W4297445027C192562407 @default.
- W4297445027 hasConceptScore W4297445027C200274948 @default.
- W4297445027 hasConceptScore W4297445027C204223013 @default.
- W4297445027 hasConceptScore W4297445027C24326235 @default.
- W4297445027 hasConceptScore W4297445027C2779227376 @default.
- W4297445027 hasConceptScore W4297445027C41008148 @default.
- W4297445027 hasConceptScore W4297445027C49040817 @default.
- W4297445027 hasConceptScore W4297445027C53524968 @default.
- W4297445027 hasConceptScore W4297445027C62520636 @default.
- W4297445027 hasConceptScore W4297445027C81917197 @default.
- W4297445027 hasConceptScore W4297445027C86803240 @default.
- W4297445027 hasLocation W42974450271 @default.
- W4297445027 hasLocation W42974450272 @default.
- W4297445027 hasOpenAccess W4297445027 @default.
- W4297445027 hasPrimaryLocation W42974450271 @default.
- W4297445027 hasRelatedWork W1506498111 @default.
- W4297445027 hasRelatedWork W1983850620 @default.
- W4297445027 hasRelatedWork W1984343152 @default.
- W4297445027 hasRelatedWork W1991202148 @default.
- W4297445027 hasRelatedWork W2007100303 @default.
- W4297445027 hasRelatedWork W2022121633 @default.
- W4297445027 hasRelatedWork W2942073039 @default.
- W4297445027 hasRelatedWork W2949369226 @default.
- W4297445027 hasRelatedWork W4307818291 @default.
- W4297445027 hasRelatedWork W4321635716 @default.
- W4297445027 isParatext "false" @default.
- W4297445027 isRetracted "false" @default.
- W4297445027 workType "article" @default.