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- W4301456490 endingPage "82" @default.
- W4301456490 startingPage "79" @default.
- W4301456490 created "2022-10-05" @default.
- W4301456490 creator A5002953599 @default.
- W4301456490 creator A5008173828 @default.
- W4301456490 creator A5024905617 @default.
- W4301456490 creator A5079849847 @default.
- W4301456490 creator A5080220357 @default.
- W4301456490 creator A5090929244 @default.
- W4301456490 date "2007-11-20" @default.
- W4301456490 modified "2023-10-16" @default.
- W4301456490 title "Peracetic Acid as Active Species in Mixtures for Selective Etching of SiGe/Si Layer Systems – Aspects of Chemistry and Analytics" @default.
- W4301456490 doi "https://doi.org/10.4028/3-908451-46-9.79" @default.
- W4301456490 hasPublicationYear "2007" @default.
- W4301456490 type Work @default.
- W4301456490 citedByCount "0" @default.
- W4301456490 crossrefType "book-chapter" @default.
- W4301456490 hasAuthorship W4301456490A5002953599 @default.
- W4301456490 hasAuthorship W4301456490A5008173828 @default.
- W4301456490 hasAuthorship W4301456490A5024905617 @default.
- W4301456490 hasAuthorship W4301456490A5079849847 @default.
- W4301456490 hasAuthorship W4301456490A5080220357 @default.
- W4301456490 hasAuthorship W4301456490A5090929244 @default.
- W4301456490 hasConcept C100460472 @default.
- W4301456490 hasConcept C127413603 @default.
- W4301456490 hasConcept C171250308 @default.
- W4301456490 hasConcept C178790620 @default.
- W4301456490 hasConcept C185592680 @default.
- W4301456490 hasConcept C192562407 @default.
- W4301456490 hasConcept C2777309684 @default.
- W4301456490 hasConcept C2779227376 @default.
- W4301456490 hasConcept C42360764 @default.
- W4301456490 hasConcept C533411734 @default.
- W4301456490 hasConceptScore W4301456490C100460472 @default.
- W4301456490 hasConceptScore W4301456490C127413603 @default.
- W4301456490 hasConceptScore W4301456490C171250308 @default.
- W4301456490 hasConceptScore W4301456490C178790620 @default.
- W4301456490 hasConceptScore W4301456490C185592680 @default.
- W4301456490 hasConceptScore W4301456490C192562407 @default.
- W4301456490 hasConceptScore W4301456490C2777309684 @default.
- W4301456490 hasConceptScore W4301456490C2779227376 @default.
- W4301456490 hasConceptScore W4301456490C42360764 @default.
- W4301456490 hasConceptScore W4301456490C533411734 @default.
- W4301456490 hasLocation W43014564901 @default.
- W4301456490 hasOpenAccess W4301456490 @default.
- W4301456490 hasPrimaryLocation W43014564901 @default.
- W4301456490 hasRelatedWork W1966846703 @default.
- W4301456490 hasRelatedWork W1968777335 @default.
- W4301456490 hasRelatedWork W1972216760 @default.
- W4301456490 hasRelatedWork W2324577260 @default.
- W4301456490 hasRelatedWork W2342916893 @default.
- W4301456490 hasRelatedWork W2462115696 @default.
- W4301456490 hasRelatedWork W2509384934 @default.
- W4301456490 hasRelatedWork W2910704680 @default.
- W4301456490 hasRelatedWork W2961581639 @default.
- W4301456490 hasRelatedWork W2985940919 @default.
- W4301456490 isParatext "false" @default.
- W4301456490 isRetracted "false" @default.
- W4301456490 workType "book-chapter" @default.