Matches in SemOpenAlex for { <https://semopenalex.org/work/W4301668023> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W4301668023 created "2022-10-05" @default.
- W4301668023 creator A5000189425 @default.
- W4301668023 creator A5036548951 @default.
- W4301668023 creator A5044430127 @default.
- W4301668023 creator A5066071663 @default.
- W4301668023 creator A5084262464 @default.
- W4301668023 date "2002-01-01" @default.
- W4301668023 modified "2023-10-18" @default.
- W4301668023 title "Ion flux composition in HBr/Cl2/O2 and HBr/Cl2/O2/CF4 chemistries during silicon etching in industrial high density plasmas" @default.
- W4301668023 hasPublicationYear "2002" @default.
- W4301668023 type Work @default.
- W4301668023 citedByCount "0" @default.
- W4301668023 crossrefType "journal-article" @default.
- W4301668023 hasAuthorship W4301668023A5000189425 @default.
- W4301668023 hasAuthorship W4301668023A5036548951 @default.
- W4301668023 hasAuthorship W4301668023A5044430127 @default.
- W4301668023 hasAuthorship W4301668023A5066071663 @default.
- W4301668023 hasAuthorship W4301668023A5084262464 @default.
- W4301668023 hasBestOaLocation W43016680231 @default.
- W4301668023 hasConcept C100460472 @default.
- W4301668023 hasConcept C107872376 @default.
- W4301668023 hasConcept C113196181 @default.
- W4301668023 hasConcept C121332964 @default.
- W4301668023 hasConcept C138885662 @default.
- W4301668023 hasConcept C145148216 @default.
- W4301668023 hasConcept C171250308 @default.
- W4301668023 hasConcept C178790620 @default.
- W4301668023 hasConcept C184779094 @default.
- W4301668023 hasConcept C185544564 @default.
- W4301668023 hasConcept C185592680 @default.
- W4301668023 hasConcept C191897082 @default.
- W4301668023 hasConcept C192562407 @default.
- W4301668023 hasConcept C2779227376 @default.
- W4301668023 hasConcept C40231798 @default.
- W4301668023 hasConcept C41895202 @default.
- W4301668023 hasConcept C49040817 @default.
- W4301668023 hasConcept C544956773 @default.
- W4301668023 hasConcept C68709404 @default.
- W4301668023 hasConcept C82706917 @default.
- W4301668023 hasConceptScore W4301668023C100460472 @default.
- W4301668023 hasConceptScore W4301668023C107872376 @default.
- W4301668023 hasConceptScore W4301668023C113196181 @default.
- W4301668023 hasConceptScore W4301668023C121332964 @default.
- W4301668023 hasConceptScore W4301668023C138885662 @default.
- W4301668023 hasConceptScore W4301668023C145148216 @default.
- W4301668023 hasConceptScore W4301668023C171250308 @default.
- W4301668023 hasConceptScore W4301668023C178790620 @default.
- W4301668023 hasConceptScore W4301668023C184779094 @default.
- W4301668023 hasConceptScore W4301668023C185544564 @default.
- W4301668023 hasConceptScore W4301668023C185592680 @default.
- W4301668023 hasConceptScore W4301668023C191897082 @default.
- W4301668023 hasConceptScore W4301668023C192562407 @default.
- W4301668023 hasConceptScore W4301668023C2779227376 @default.
- W4301668023 hasConceptScore W4301668023C40231798 @default.
- W4301668023 hasConceptScore W4301668023C41895202 @default.
- W4301668023 hasConceptScore W4301668023C49040817 @default.
- W4301668023 hasConceptScore W4301668023C544956773 @default.
- W4301668023 hasConceptScore W4301668023C68709404 @default.
- W4301668023 hasConceptScore W4301668023C82706917 @default.
- W4301668023 hasLocation W43016680231 @default.
- W4301668023 hasLocation W43016680232 @default.
- W4301668023 hasOpenAccess W4301668023 @default.
- W4301668023 hasPrimaryLocation W43016680231 @default.
- W4301668023 hasRelatedWork W1617534506 @default.
- W4301668023 hasRelatedWork W1981954100 @default.
- W4301668023 hasRelatedWork W2061000623 @default.
- W4301668023 hasRelatedWork W2091949762 @default.
- W4301668023 hasRelatedWork W2144642093 @default.
- W4301668023 hasRelatedWork W2610925617 @default.
- W4301668023 hasRelatedWork W3040943442 @default.
- W4301668023 hasRelatedWork W3213614029 @default.
- W4301668023 hasRelatedWork W4225156743 @default.
- W4301668023 hasRelatedWork W2083108293 @default.
- W4301668023 isParatext "false" @default.
- W4301668023 isRetracted "false" @default.
- W4301668023 workType "article" @default.