Matches in SemOpenAlex for { <https://semopenalex.org/work/W4377989495> ?p ?o ?g. }
- W4377989495 endingPage "3186" @default.
- W4377989495 startingPage "3172" @default.
- W4377989495 created "2023-05-25" @default.
- W4377989495 creator A5016793636 @default.
- W4377989495 creator A5019041750 @default.
- W4377989495 creator A5023869750 @default.
- W4377989495 creator A5048416333 @default.
- W4377989495 creator A5051027971 @default.
- W4377989495 creator A5070778210 @default.
- W4377989495 date "2023-05-24" @default.
- W4377989495 modified "2023-10-14" @default.
- W4377989495 title "Effect of DL-alanine as an auxiliary complexing agent in TSV copper film CMP" @default.
- W4377989495 cites W1971142103 @default.
- W4377989495 cites W1974999209 @default.
- W4377989495 cites W1987577362 @default.
- W4377989495 cites W2012201395 @default.
- W4377989495 cites W2019878126 @default.
- W4377989495 cites W2020219601 @default.
- W4377989495 cites W2031145224 @default.
- W4377989495 cites W2046139226 @default.
- W4377989495 cites W2052592507 @default.
- W4377989495 cites W2053356542 @default.
- W4377989495 cites W2054437278 @default.
- W4377989495 cites W2060014660 @default.
- W4377989495 cites W2088407355 @default.
- W4377989495 cites W2145296914 @default.
- W4377989495 cites W2222272830 @default.
- W4377989495 cites W2275885572 @default.
- W4377989495 cites W2321516744 @default.
- W4377989495 cites W2335805658 @default.
- W4377989495 cites W2560107487 @default.
- W4377989495 cites W2573926654 @default.
- W4377989495 cites W2808966583 @default.
- W4377989495 cites W2990795274 @default.
- W4377989495 cites W2991271770 @default.
- W4377989495 cites W3000457084 @default.
- W4377989495 cites W3040052229 @default.
- W4377989495 cites W3173620542 @default.
- W4377989495 cites W3196757840 @default.
- W4377989495 cites W4229025653 @default.
- W4377989495 doi "https://doi.org/10.1557/s43578-023-01042-5" @default.
- W4377989495 hasPublicationYear "2023" @default.
- W4377989495 type Work @default.
- W4377989495 citedByCount "0" @default.
- W4377989495 crossrefType "journal-article" @default.
- W4377989495 hasAuthorship W4377989495A5016793636 @default.
- W4377989495 hasAuthorship W4377989495A5019041750 @default.
- W4377989495 hasAuthorship W4377989495A5023869750 @default.
- W4377989495 hasAuthorship W4377989495A5048416333 @default.
- W4377989495 hasAuthorship W4377989495A5051027971 @default.
- W4377989495 hasAuthorship W4377989495A5070778210 @default.
- W4377989495 hasConcept C100460472 @default.
- W4377989495 hasConcept C127413603 @default.
- W4377989495 hasConcept C138113353 @default.
- W4377989495 hasConcept C159985019 @default.
- W4377989495 hasConcept C171250308 @default.
- W4377989495 hasConcept C175708663 @default.
- W4377989495 hasConcept C180088628 @default.
- W4377989495 hasConcept C185592680 @default.
- W4377989495 hasConcept C187937830 @default.
- W4377989495 hasConcept C191897082 @default.
- W4377989495 hasConcept C192562407 @default.
- W4377989495 hasConcept C2779227376 @default.
- W4377989495 hasConcept C2779856020 @default.
- W4377989495 hasConcept C33220542 @default.
- W4377989495 hasConcept C42360764 @default.
- W4377989495 hasConcept C515207424 @default.
- W4377989495 hasConcept C544153396 @default.
- W4377989495 hasConcept C544778455 @default.
- W4377989495 hasConcept C544956773 @default.
- W4377989495 hasConcept C55493867 @default.
- W4377989495 hasConcept C88380143 @default.
- W4377989495 hasConcept C94293008 @default.
- W4377989495 hasConceptScore W4377989495C100460472 @default.
- W4377989495 hasConceptScore W4377989495C127413603 @default.
- W4377989495 hasConceptScore W4377989495C138113353 @default.
- W4377989495 hasConceptScore W4377989495C159985019 @default.
- W4377989495 hasConceptScore W4377989495C171250308 @default.
- W4377989495 hasConceptScore W4377989495C175708663 @default.
- W4377989495 hasConceptScore W4377989495C180088628 @default.
- W4377989495 hasConceptScore W4377989495C185592680 @default.
- W4377989495 hasConceptScore W4377989495C187937830 @default.
- W4377989495 hasConceptScore W4377989495C191897082 @default.
- W4377989495 hasConceptScore W4377989495C192562407 @default.
- W4377989495 hasConceptScore W4377989495C2779227376 @default.
- W4377989495 hasConceptScore W4377989495C2779856020 @default.
- W4377989495 hasConceptScore W4377989495C33220542 @default.
- W4377989495 hasConceptScore W4377989495C42360764 @default.
- W4377989495 hasConceptScore W4377989495C515207424 @default.
- W4377989495 hasConceptScore W4377989495C544153396 @default.
- W4377989495 hasConceptScore W4377989495C544778455 @default.
- W4377989495 hasConceptScore W4377989495C544956773 @default.
- W4377989495 hasConceptScore W4377989495C55493867 @default.
- W4377989495 hasConceptScore W4377989495C88380143 @default.
- W4377989495 hasConceptScore W4377989495C94293008 @default.
- W4377989495 hasFunder F4320321001 @default.
- W4377989495 hasIssue "12" @default.
- W4377989495 hasLocation W43779894951 @default.
- W4377989495 hasOpenAccess W4377989495 @default.
- W4377989495 hasPrimaryLocation W43779894951 @default.