Matches in SemOpenAlex for { <https://semopenalex.org/work/W4383106835> ?p ?o ?g. }
- W4383106835 created "2023-07-05" @default.
- W4383106835 creator A5016079493 @default.
- W4383106835 creator A5017402687 @default.
- W4383106835 creator A5020341205 @default.
- W4383106835 creator A5030607898 @default.
- W4383106835 creator A5040275836 @default.
- W4383106835 creator A5047518591 @default.
- W4383106835 creator A5050667760 @default.
- W4383106835 creator A5059403242 @default.
- W4383106835 creator A5060362551 @default.
- W4383106835 creator A5061168904 @default.
- W4383106835 creator A5065112242 @default.
- W4383106835 creator A5068810115 @default.
- W4383106835 creator A5071931054 @default.
- W4383106835 creator A5074819966 @default.
- W4383106835 creator A5074845919 @default.
- W4383106835 creator A5077559775 @default.
- W4383106835 creator A5078780182 @default.
- W4383106835 creator A5080691471 @default.
- W4383106835 creator A5087666509 @default.
- W4383106835 date "2023-07-02" @default.
- W4383106835 modified "2023-09-25" @default.
- W4383106835 title "How chitosan can be considered as a promising eco-efficient candidate to replace commercial organic-based resists in the photolithography process. Focus on photopatterning and etching behavior in fluorinated plasmas" @default.
- W4383106835 hasPublicationYear "2023" @default.
- W4383106835 type Work @default.
- W4383106835 citedByCount "0" @default.
- W4383106835 crossrefType "proceedings-article" @default.
- W4383106835 hasAuthorship W4383106835A5016079493 @default.
- W4383106835 hasAuthorship W4383106835A5017402687 @default.
- W4383106835 hasAuthorship W4383106835A5020341205 @default.
- W4383106835 hasAuthorship W4383106835A5030607898 @default.
- W4383106835 hasAuthorship W4383106835A5040275836 @default.
- W4383106835 hasAuthorship W4383106835A5047518591 @default.
- W4383106835 hasAuthorship W4383106835A5050667760 @default.
- W4383106835 hasAuthorship W4383106835A5059403242 @default.
- W4383106835 hasAuthorship W4383106835A5060362551 @default.
- W4383106835 hasAuthorship W4383106835A5061168904 @default.
- W4383106835 hasAuthorship W4383106835A5065112242 @default.
- W4383106835 hasAuthorship W4383106835A5068810115 @default.
- W4383106835 hasAuthorship W4383106835A5071931054 @default.
- W4383106835 hasAuthorship W4383106835A5074819966 @default.
- W4383106835 hasAuthorship W4383106835A5074845919 @default.
- W4383106835 hasAuthorship W4383106835A5077559775 @default.
- W4383106835 hasAuthorship W4383106835A5078780182 @default.
- W4383106835 hasAuthorship W4383106835A5080691471 @default.
- W4383106835 hasAuthorship W4383106835A5087666509 @default.
- W4383106835 hasConcept C100460472 @default.
- W4383106835 hasConcept C105487726 @default.
- W4383106835 hasConcept C107187091 @default.
- W4383106835 hasConcept C111919701 @default.
- W4383106835 hasConcept C120665830 @default.
- W4383106835 hasConcept C121332964 @default.
- W4383106835 hasConcept C127413603 @default.
- W4383106835 hasConcept C134406635 @default.
- W4383106835 hasConcept C162996421 @default.
- W4383106835 hasConcept C171250308 @default.
- W4383106835 hasConcept C192209626 @default.
- W4383106835 hasConcept C192562407 @default.
- W4383106835 hasConcept C204223013 @default.
- W4383106835 hasConcept C21880701 @default.
- W4383106835 hasConcept C2779227376 @default.
- W4383106835 hasConcept C2779732960 @default.
- W4383106835 hasConcept C41008148 @default.
- W4383106835 hasConcept C42360764 @default.
- W4383106835 hasConcept C49040817 @default.
- W4383106835 hasConcept C53524968 @default.
- W4383106835 hasConcept C98045186 @default.
- W4383106835 hasConceptScore W4383106835C100460472 @default.
- W4383106835 hasConceptScore W4383106835C105487726 @default.
- W4383106835 hasConceptScore W4383106835C107187091 @default.
- W4383106835 hasConceptScore W4383106835C111919701 @default.
- W4383106835 hasConceptScore W4383106835C120665830 @default.
- W4383106835 hasConceptScore W4383106835C121332964 @default.
- W4383106835 hasConceptScore W4383106835C127413603 @default.
- W4383106835 hasConceptScore W4383106835C134406635 @default.
- W4383106835 hasConceptScore W4383106835C162996421 @default.
- W4383106835 hasConceptScore W4383106835C171250308 @default.
- W4383106835 hasConceptScore W4383106835C192209626 @default.
- W4383106835 hasConceptScore W4383106835C192562407 @default.
- W4383106835 hasConceptScore W4383106835C204223013 @default.
- W4383106835 hasConceptScore W4383106835C21880701 @default.
- W4383106835 hasConceptScore W4383106835C2779227376 @default.
- W4383106835 hasConceptScore W4383106835C2779732960 @default.
- W4383106835 hasConceptScore W4383106835C41008148 @default.
- W4383106835 hasConceptScore W4383106835C42360764 @default.
- W4383106835 hasConceptScore W4383106835C49040817 @default.
- W4383106835 hasConceptScore W4383106835C53524968 @default.
- W4383106835 hasConceptScore W4383106835C98045186 @default.
- W4383106835 hasLocation W43831068351 @default.
- W4383106835 hasOpenAccess W4383106835 @default.
- W4383106835 hasPrimaryLocation W43831068351 @default.
- W4383106835 hasRelatedWork W1977121769 @default.
- W4383106835 hasRelatedWork W2080447637 @default.
- W4383106835 hasRelatedWork W2092921751 @default.
- W4383106835 hasRelatedWork W2173155213 @default.
- W4383106835 hasRelatedWork W2546756142 @default.
- W4383106835 hasRelatedWork W2749914426 @default.
- W4383106835 hasRelatedWork W2790813161 @default.
- W4383106835 hasRelatedWork W2904826996 @default.
- W4383106835 hasRelatedWork W2925496717 @default.