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Matches in SemOpenAlex for { <https://semopenalex.org/work/W4385696385> ?p ?o ?g. }

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• W4385696385 date "2023-01-01" @default.
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• W4385696385 title "An Etching Mechanism Based on Hydrogen Fluoride Interactions with Hydrogenated Sin Films Using Hf/H2 and Cf4/H2 Plasmas" @default.
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• W4385696385 doi "https://doi.org/10.2139/ssrn.4536092" @default.
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