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- W4385859332 created "2023-08-17" @default.
- W4385859332 creator A5073342932 @default.
- W4385859332 date "2023-01-01" @default.
- W4385859332 modified "2023-10-16" @default.
- W4385859332 title "Report from the Extreme Ultraviolet (EUV) Lithography Working Group Meeting: Current State, Needs, and Path Forward" @default.
- W4385859332 doi "https://doi.org/10.6028/nist.sp.1500-208" @default.
- W4385859332 hasPublicationYear "2023" @default.
- W4385859332 type Work @default.
- W4385859332 citedByCount "0" @default.
- W4385859332 crossrefType "report" @default.
- W4385859332 hasAuthorship W4385859332A5073342932 @default.
- W4385859332 hasConcept C111919701 @default.
- W4385859332 hasConcept C11413529 @default.
- W4385859332 hasConcept C120665830 @default.
- W4385859332 hasConcept C121332964 @default.
- W4385859332 hasConcept C146024833 @default.
- W4385859332 hasConcept C162996421 @default.
- W4385859332 hasConcept C192562407 @default.
- W4385859332 hasConcept C2777735758 @default.
- W4385859332 hasConcept C2781311116 @default.
- W4385859332 hasConcept C41008148 @default.
- W4385859332 hasConcept C48103436 @default.
- W4385859332 hasConcept C49040817 @default.
- W4385859332 hasConcept C520434653 @default.
- W4385859332 hasConcept C61696701 @default.
- W4385859332 hasConcept C62520636 @default.
- W4385859332 hasConceptScore W4385859332C111919701 @default.
- W4385859332 hasConceptScore W4385859332C11413529 @default.
- W4385859332 hasConceptScore W4385859332C120665830 @default.
- W4385859332 hasConceptScore W4385859332C121332964 @default.
- W4385859332 hasConceptScore W4385859332C146024833 @default.
- W4385859332 hasConceptScore W4385859332C162996421 @default.
- W4385859332 hasConceptScore W4385859332C192562407 @default.
- W4385859332 hasConceptScore W4385859332C2777735758 @default.
- W4385859332 hasConceptScore W4385859332C2781311116 @default.
- W4385859332 hasConceptScore W4385859332C41008148 @default.
- W4385859332 hasConceptScore W4385859332C48103436 @default.
- W4385859332 hasConceptScore W4385859332C49040817 @default.
- W4385859332 hasConceptScore W4385859332C520434653 @default.
- W4385859332 hasConceptScore W4385859332C61696701 @default.
- W4385859332 hasConceptScore W4385859332C62520636 @default.
- W4385859332 hasFunder F4320337574 @default.
- W4385859332 hasLocation W43858593321 @default.
- W4385859332 hasOpenAccess W4385859332 @default.
- W4385859332 hasPrimaryLocation W43858593321 @default.
- W4385859332 hasRelatedWork W1993389193 @default.
- W4385859332 hasRelatedWork W2046828604 @default.
- W4385859332 hasRelatedWork W2053129392 @default.
- W4385859332 hasRelatedWork W2060909322 @default.
- W4385859332 hasRelatedWork W2068783232 @default.
- W4385859332 hasRelatedWork W2095812538 @default.
- W4385859332 hasRelatedWork W2196035214 @default.
- W4385859332 hasRelatedWork W2939774687 @default.
- W4385859332 hasRelatedWork W3045263584 @default.
- W4385859332 hasRelatedWork W3053914760 @default.
- W4385859332 isParatext "false" @default.
- W4385859332 isRetracted "false" @default.
- W4385859332 workType "report" @default.