Matches in SemOpenAlex for { <https://semopenalex.org/work/W5484610> ?p ?o ?g. }
Showing items 1 to 51 of
51
with 100 items per page.
- W5484610 endingPage "101" @default.
- W5484610 startingPage "95" @default.
- W5484610 created "2016-06-24" @default.
- W5484610 creator A5051716826 @default.
- W5484610 creator A5089400623 @default.
- W5484610 date "1994-01-01" @default.
- W5484610 modified "2023-09-24" @default.
- W5484610 title "Nanolithography Requirements — An Equipment Manufacturers View" @default.
- W5484610 doi "https://doi.org/10.1007/978-94-015-8261-2_11" @default.
- W5484610 hasPublicationYear "1994" @default.
- W5484610 type Work @default.
- W5484610 sameAs 5484610 @default.
- W5484610 citedByCount "0" @default.
- W5484610 crossrefType "book-chapter" @default.
- W5484610 hasAuthorship W5484610A5051716826 @default.
- W5484610 hasAuthorship W5484610A5089400623 @default.
- W5484610 hasConcept C127413603 @default.
- W5484610 hasConcept C136525101 @default.
- W5484610 hasConcept C142724271 @default.
- W5484610 hasConcept C162117346 @default.
- W5484610 hasConcept C171250308 @default.
- W5484610 hasConcept C192562407 @default.
- W5484610 hasConcept C201995342 @default.
- W5484610 hasConcept C204787440 @default.
- W5484610 hasConcept C71924100 @default.
- W5484610 hasConceptScore W5484610C127413603 @default.
- W5484610 hasConceptScore W5484610C136525101 @default.
- W5484610 hasConceptScore W5484610C142724271 @default.
- W5484610 hasConceptScore W5484610C162117346 @default.
- W5484610 hasConceptScore W5484610C171250308 @default.
- W5484610 hasConceptScore W5484610C192562407 @default.
- W5484610 hasConceptScore W5484610C201995342 @default.
- W5484610 hasConceptScore W5484610C204787440 @default.
- W5484610 hasConceptScore W5484610C71924100 @default.
- W5484610 hasLocation W54846101 @default.
- W5484610 hasOpenAccess W5484610 @default.
- W5484610 hasPrimaryLocation W54846101 @default.
- W5484610 hasRelatedWork W1854484501 @default.
- W5484610 hasRelatedWork W2003596345 @default.
- W5484610 hasRelatedWork W2030351767 @default.
- W5484610 hasRelatedWork W2102363196 @default.
- W5484610 hasRelatedWork W2141672353 @default.
- W5484610 hasRelatedWork W2145855016 @default.
- W5484610 hasRelatedWork W2322100430 @default.
- W5484610 hasRelatedWork W3142607661 @default.
- W5484610 hasRelatedWork W3165600070 @default.
- W5484610 hasRelatedWork W2182373692 @default.
- W5484610 isParatext "false" @default.
- W5484610 isRetracted "false" @default.
- W5484610 magId "5484610" @default.
- W5484610 workType "book-chapter" @default.