Matches in SemOpenAlex for { <https://semopenalex.org/work/W571331714> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W571331714 created "2016-06-24" @default.
- W571331714 creator A5026973085 @default.
- W571331714 creator A5031394142 @default.
- W571331714 creator A5044417943 @default.
- W571331714 creator A5072767598 @default.
- W571331714 creator A5082960928 @default.
- W571331714 creator A5088219910 @default.
- W571331714 date "1997-01-01" @default.
- W571331714 modified "2023-09-23" @default.
- W571331714 title "A Reliable Double Level Interconnection Technology for Giga Bit DRAMs Using SiO2 Mask Al Etching and PECVD SiOF" @default.
- W571331714 doi "https://doi.org/10.7567/ssdm.1997.a-10-5" @default.
- W571331714 hasPublicationYear "1997" @default.
- W571331714 type Work @default.
- W571331714 sameAs 571331714 @default.
- W571331714 citedByCount "0" @default.
- W571331714 crossrefType "proceedings-article" @default.
- W571331714 hasAuthorship W571331714A5026973085 @default.
- W571331714 hasAuthorship W571331714A5031394142 @default.
- W571331714 hasAuthorship W571331714A5044417943 @default.
- W571331714 hasAuthorship W571331714A5072767598 @default.
- W571331714 hasAuthorship W571331714A5082960928 @default.
- W571331714 hasAuthorship W571331714A5088219910 @default.
- W571331714 hasConcept C100460472 @default.
- W571331714 hasConcept C117011727 @default.
- W571331714 hasConcept C123745756 @default.
- W571331714 hasConcept C127413603 @default.
- W571331714 hasConcept C149635348 @default.
- W571331714 hasConcept C171250308 @default.
- W571331714 hasConcept C192562407 @default.
- W571331714 hasConcept C24326235 @default.
- W571331714 hasConcept C2779227376 @default.
- W571331714 hasConcept C31258907 @default.
- W571331714 hasConcept C38347018 @default.
- W571331714 hasConcept C41008148 @default.
- W571331714 hasConcept C49040817 @default.
- W571331714 hasConcept C57410435 @default.
- W571331714 hasConcept C7366592 @default.
- W571331714 hasConcept C76155785 @default.
- W571331714 hasConcept C9390403 @default.
- W571331714 hasConceptScore W571331714C100460472 @default.
- W571331714 hasConceptScore W571331714C117011727 @default.
- W571331714 hasConceptScore W571331714C123745756 @default.
- W571331714 hasConceptScore W571331714C127413603 @default.
- W571331714 hasConceptScore W571331714C149635348 @default.
- W571331714 hasConceptScore W571331714C171250308 @default.
- W571331714 hasConceptScore W571331714C192562407 @default.
- W571331714 hasConceptScore W571331714C24326235 @default.
- W571331714 hasConceptScore W571331714C2779227376 @default.
- W571331714 hasConceptScore W571331714C31258907 @default.
- W571331714 hasConceptScore W571331714C38347018 @default.
- W571331714 hasConceptScore W571331714C41008148 @default.
- W571331714 hasConceptScore W571331714C49040817 @default.
- W571331714 hasConceptScore W571331714C57410435 @default.
- W571331714 hasConceptScore W571331714C7366592 @default.
- W571331714 hasConceptScore W571331714C76155785 @default.
- W571331714 hasConceptScore W571331714C9390403 @default.
- W571331714 hasLocation W5713317141 @default.
- W571331714 hasOpenAccess W571331714 @default.
- W571331714 hasPrimaryLocation W5713317141 @default.
- W571331714 hasRelatedWork W1919575875 @default.
- W571331714 hasRelatedWork W1971591932 @default.
- W571331714 hasRelatedWork W2061776610 @default.
- W571331714 hasRelatedWork W2125290194 @default.
- W571331714 hasRelatedWork W2138037336 @default.
- W571331714 hasRelatedWork W2147287292 @default.
- W571331714 hasRelatedWork W2319533014 @default.
- W571331714 hasRelatedWork W2337889794 @default.
- W571331714 hasRelatedWork W2461203167 @default.
- W571331714 hasRelatedWork W2462097473 @default.
- W571331714 hasRelatedWork W2466104011 @default.
- W571331714 hasRelatedWork W2471855528 @default.
- W571331714 hasRelatedWork W2472816245 @default.
- W571331714 hasRelatedWork W2474574791 @default.
- W571331714 hasRelatedWork W2533509910 @default.
- W571331714 hasRelatedWork W2534824542 @default.
- W571331714 hasRelatedWork W2535248847 @default.
- W571331714 hasRelatedWork W403713489 @default.
- W571331714 hasRelatedWork W594523203 @default.
- W571331714 hasRelatedWork W597040002 @default.
- W571331714 isParatext "false" @default.
- W571331714 isRetracted "false" @default.
- W571331714 magId "571331714" @default.
- W571331714 workType "article" @default.