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- W576788314 created "2016-06-24" @default.
- W576788314 creator A5008690719 @default.
- W576788314 creator A5009867399 @default.
- W576788314 creator A5049861668 @default.
- W576788314 creator A5052909070 @default.
- W576788314 creator A5054685398 @default.
- W576788314 date "2005-01-01" @default.
- W576788314 modified "2023-09-25" @default.
- W576788314 title "Ta-based metal gates (Ta, TaBx, TaNx and TaCx) -Modulated Work Function and Improved Thermal Stability-" @default.
- W576788314 doi "https://doi.org/10.7567/ssdm.2005.a-8-2" @default.
- W576788314 hasPublicationYear "2005" @default.
- W576788314 type Work @default.
- W576788314 sameAs 576788314 @default.
- W576788314 citedByCount "0" @default.
- W576788314 crossrefType "proceedings-article" @default.
- W576788314 hasAuthorship W576788314A5008690719 @default.
- W576788314 hasAuthorship W576788314A5009867399 @default.
- W576788314 hasAuthorship W576788314A5049861668 @default.
- W576788314 hasAuthorship W576788314A5052909070 @default.
- W576788314 hasAuthorship W576788314A5054685398 @default.
- W576788314 hasConcept C115235246 @default.
- W576788314 hasConcept C121332964 @default.
- W576788314 hasConcept C127413603 @default.
- W576788314 hasConcept C14036430 @default.
- W576788314 hasConcept C18762648 @default.
- W576788314 hasConcept C191897082 @default.
- W576788314 hasConcept C192562407 @default.
- W576788314 hasConcept C204530211 @default.
- W576788314 hasConcept C42360764 @default.
- W576788314 hasConcept C544153396 @default.
- W576788314 hasConcept C59061564 @default.
- W576788314 hasConcept C61696701 @default.
- W576788314 hasConcept C78458016 @default.
- W576788314 hasConcept C78519656 @default.
- W576788314 hasConcept C86803240 @default.
- W576788314 hasConcept C97355855 @default.
- W576788314 hasConceptScore W576788314C115235246 @default.
- W576788314 hasConceptScore W576788314C121332964 @default.
- W576788314 hasConceptScore W576788314C127413603 @default.
- W576788314 hasConceptScore W576788314C14036430 @default.
- W576788314 hasConceptScore W576788314C18762648 @default.
- W576788314 hasConceptScore W576788314C191897082 @default.
- W576788314 hasConceptScore W576788314C192562407 @default.
- W576788314 hasConceptScore W576788314C204530211 @default.
- W576788314 hasConceptScore W576788314C42360764 @default.
- W576788314 hasConceptScore W576788314C544153396 @default.
- W576788314 hasConceptScore W576788314C59061564 @default.
- W576788314 hasConceptScore W576788314C61696701 @default.
- W576788314 hasConceptScore W576788314C78458016 @default.
- W576788314 hasConceptScore W576788314C78519656 @default.
- W576788314 hasConceptScore W576788314C86803240 @default.
- W576788314 hasConceptScore W576788314C97355855 @default.
- W576788314 hasLocation W5767883141 @default.
- W576788314 hasOpenAccess W576788314 @default.
- W576788314 hasPrimaryLocation W5767883141 @default.
- W576788314 hasRelatedWork W1966407734 @default.
- W576788314 hasRelatedWork W2009448011 @default.
- W576788314 hasRelatedWork W2013545508 @default.
- W576788314 hasRelatedWork W2051655198 @default.
- W576788314 hasRelatedWork W2084756663 @default.
- W576788314 hasRelatedWork W2244869593 @default.
- W576788314 hasRelatedWork W2999132482 @default.
- W576788314 hasRelatedWork W3015445174 @default.
- W576788314 hasRelatedWork W3202245346 @default.
- W576788314 hasRelatedWork W1959075996 @default.
- W576788314 isParatext "false" @default.
- W576788314 isRetracted "false" @default.
- W576788314 magId "576788314" @default.
- W576788314 workType "article" @default.