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- W58145240 created "2016-06-24" @default.
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- W58145240 date "1997-01-01" @default.
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- W58145240 title "Herstellung aktiver Bauelementschichten" @default.
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- W58145240 doi "https://doi.org/10.1007/978-3-642-60786-8_4" @default.
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