Matches in SemOpenAlex for { <https://semopenalex.org/work/W598976462> ?p ?o ?g. }
Showing items 1 to 27 of
27
with 100 items per page.
- W598976462 endingPage "368" @default.
- W598976462 startingPage "367" @default.
- W598976462 created "2016-06-24" @default.
- W598976462 creator A5009126127 @default.
- W598976462 creator A5023169869 @default.
- W598976462 creator A5087017961 @default.
- W598976462 date "2010-01-01" @default.
- W598976462 modified "2023-09-23" @default.
- W598976462 title "半導体産業の進展経緯に関する考察（第9報）:エッチング技術の進展と半導体市場" @default.
- W598976462 hasPublicationYear "2010" @default.
- W598976462 type Work @default.
- W598976462 sameAs 598976462 @default.
- W598976462 citedByCount "0" @default.
- W598976462 crossrefType "journal-article" @default.
- W598976462 hasAuthorship W598976462A5009126127 @default.
- W598976462 hasAuthorship W598976462A5023169869 @default.
- W598976462 hasAuthorship W598976462A5087017961 @default.
- W598976462 hasConcept C41008148 @default.
- W598976462 hasConceptScore W598976462C41008148 @default.
- W598976462 hasLocation W5989764621 @default.
- W598976462 hasOpenAccess W598976462 @default.
- W598976462 hasPrimaryLocation W5989764621 @default.
- W598976462 hasVolume "2010" @default.
- W598976462 isParatext "false" @default.
- W598976462 isRetracted "false" @default.
- W598976462 magId "598976462" @default.
- W598976462 workType "article" @default.