Matches in SemOpenAlex for { <https://semopenalex.org/work/W608460412> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W608460412 endingPage "222" @default.
- W608460412 startingPage "218" @default.
- W608460412 created "2016-06-24" @default.
- W608460412 creator A5002700680 @default.
- W608460412 creator A5025573905 @default.
- W608460412 creator A5031394142 @default.
- W608460412 creator A5085361179 @default.
- W608460412 date "1991-01-31" @default.
- W608460412 modified "2023-09-23" @default.
- W608460412 title "Study on Reaction Mechanism of Aluminum Selective Chemical Vapor Deposition with In-situ XPS Measurement : Etching and Deposition Technology :" @default.
- W608460412 hasPublicationYear "1991" @default.
- W608460412 type Work @default.
- W608460412 sameAs 608460412 @default.
- W608460412 citedByCount "0" @default.
- W608460412 crossrefType "journal-article" @default.
- W608460412 hasAuthorship W608460412A5002700680 @default.
- W608460412 hasAuthorship W608460412A5025573905 @default.
- W608460412 hasAuthorship W608460412A5031394142 @default.
- W608460412 hasAuthorship W608460412A5085361179 @default.
- W608460412 hasConcept C100460472 @default.
- W608460412 hasConcept C111548154 @default.
- W608460412 hasConcept C127313418 @default.
- W608460412 hasConcept C127413603 @default.
- W608460412 hasConcept C151730666 @default.
- W608460412 hasConcept C171250308 @default.
- W608460412 hasConcept C175708663 @default.
- W608460412 hasConcept C178790620 @default.
- W608460412 hasConcept C179104552 @default.
- W608460412 hasConcept C183866003 @default.
- W608460412 hasConcept C185592680 @default.
- W608460412 hasConcept C19067145 @default.
- W608460412 hasConcept C192562407 @default.
- W608460412 hasConcept C2777822432 @default.
- W608460412 hasConcept C2779227376 @default.
- W608460412 hasConcept C2816523 @default.
- W608460412 hasConcept C42360764 @default.
- W608460412 hasConcept C513153333 @default.
- W608460412 hasConcept C57410435 @default.
- W608460412 hasConcept C64297162 @default.
- W608460412 hasConcept C75937256 @default.
- W608460412 hasConceptScore W608460412C100460472 @default.
- W608460412 hasConceptScore W608460412C111548154 @default.
- W608460412 hasConceptScore W608460412C127313418 @default.
- W608460412 hasConceptScore W608460412C127413603 @default.
- W608460412 hasConceptScore W608460412C151730666 @default.
- W608460412 hasConceptScore W608460412C171250308 @default.
- W608460412 hasConceptScore W608460412C175708663 @default.
- W608460412 hasConceptScore W608460412C178790620 @default.
- W608460412 hasConceptScore W608460412C179104552 @default.
- W608460412 hasConceptScore W608460412C183866003 @default.
- W608460412 hasConceptScore W608460412C185592680 @default.
- W608460412 hasConceptScore W608460412C19067145 @default.
- W608460412 hasConceptScore W608460412C192562407 @default.
- W608460412 hasConceptScore W608460412C2777822432 @default.
- W608460412 hasConceptScore W608460412C2779227376 @default.
- W608460412 hasConceptScore W608460412C2816523 @default.
- W608460412 hasConceptScore W608460412C42360764 @default.
- W608460412 hasConceptScore W608460412C513153333 @default.
- W608460412 hasConceptScore W608460412C57410435 @default.
- W608460412 hasConceptScore W608460412C64297162 @default.
- W608460412 hasConceptScore W608460412C75937256 @default.
- W608460412 hasLocation W6084604121 @default.
- W608460412 hasOpenAccess W608460412 @default.
- W608460412 hasPrimaryLocation W6084604121 @default.
- W608460412 hasRelatedWork W1964511326 @default.
- W608460412 hasRelatedWork W1987927439 @default.
- W608460412 hasRelatedWork W2048564144 @default.
- W608460412 hasRelatedWork W2081206566 @default.
- W608460412 hasRelatedWork W2116079753 @default.
- W608460412 hasRelatedWork W2136752736 @default.
- W608460412 hasRelatedWork W2140300541 @default.
- W608460412 hasRelatedWork W2273275957 @default.
- W608460412 hasRelatedWork W2314682760 @default.
- W608460412 hasRelatedWork W2464790060 @default.
- W608460412 hasRelatedWork W2508085866 @default.
- W608460412 hasRelatedWork W2626978829 @default.
- W608460412 hasRelatedWork W2941053405 @default.
- W608460412 hasRelatedWork W3015308251 @default.
- W608460412 hasRelatedWork W3033692737 @default.
- W608460412 hasRelatedWork W3035956981 @default.
- W608460412 hasRelatedWork W3136887205 @default.
- W608460412 hasRelatedWork W3205104727 @default.
- W608460412 hasRelatedWork W599268485 @default.
- W608460412 hasRelatedWork W2338610545 @default.
- W608460412 hasVolume "4" @default.
- W608460412 isParatext "false" @default.
- W608460412 isRetracted "false" @default.
- W608460412 magId "608460412" @default.
- W608460412 workType "article" @default.