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- W623213963 endingPage "14" @default.
- W623213963 startingPage "110" @default.
- W623213963 created "2016-06-24" @default.
- W623213963 creator A5039401752 @default.
- W623213963 creator A5071656413 @default.
- W623213963 creator A5083912552 @default.
- W623213963 creator A5086315629 @default.
- W623213963 date "2008-12-04" @default.
- W623213963 modified "2023-09-26" @default.
- W623213963 title "Dry Etching Using NF" @default.
- W623213963 doi "https://doi.org/10.1520/stp32647s" @default.
- W623213963 hasPublicationYear "2008" @default.
- W623213963 type Work @default.
- W623213963 sameAs 623213963 @default.
- W623213963 citedByCount "1" @default.
- W623213963 crossrefType "book-chapter" @default.
- W623213963 hasAuthorship W623213963A5039401752 @default.
- W623213963 hasAuthorship W623213963A5071656413 @default.
- W623213963 hasAuthorship W623213963A5083912552 @default.
- W623213963 hasAuthorship W623213963A5086315629 @default.
- W623213963 hasConcept C100460472 @default.
- W623213963 hasConcept C1291036 @default.
- W623213963 hasConcept C159985019 @default.
- W623213963 hasConcept C192562407 @default.
- W623213963 hasConcept C2779227376 @default.
- W623213963 hasConceptScore W623213963C100460472 @default.
- W623213963 hasConceptScore W623213963C1291036 @default.
- W623213963 hasConceptScore W623213963C159985019 @default.
- W623213963 hasConceptScore W623213963C192562407 @default.
- W623213963 hasConceptScore W623213963C2779227376 @default.
- W623213963 hasLocation W6232139631 @default.
- W623213963 hasOpenAccess W623213963 @default.
- W623213963 hasPrimaryLocation W6232139631 @default.
- W623213963 hasRelatedWork W1991288435 @default.
- W623213963 hasRelatedWork W2032836434 @default.
- W623213963 hasRelatedWork W2034252264 @default.
- W623213963 hasRelatedWork W2093631838 @default.
- W623213963 hasRelatedWork W2129321973 @default.
- W623213963 hasRelatedWork W2136379107 @default.
- W623213963 hasRelatedWork W2145614259 @default.
- W623213963 hasRelatedWork W2238069398 @default.
- W623213963 hasRelatedWork W2349095401 @default.
- W623213963 hasRelatedWork W2376678868 @default.
- W623213963 isParatext "false" @default.
- W623213963 isRetracted "false" @default.
- W623213963 magId "623213963" @default.
- W623213963 workType "book-chapter" @default.